IMPROVED PERFORMANCE FROM A NEW ROTATION AND HEATING STAGE DESIGN FOR MOLECULAR-BEAM EPITAXY
UNSPECIFIED (1991) IMPROVED PERFORMANCE FROM A NEW ROTATION AND HEATING STAGE DESIGN FOR MOLECULAR-BEAM EPITAXY. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 9 (5). pp. 2797-2798. ISSN 0734-2101Full text not available from this repository.
The performance of a substrate heater/manipulator designed to address reliability and vacuum quality issues is discussed. The manipulator employs a novel, hollow magnetic feedthrough which is directly coupled to the substrate cradle, thus eliminating a gear train between the two. The need for only two in vacuo bearings enhances reliability, with a total of 5 x 10(6) rotations accumulated to date without degradation in performance. Negligible increases in residual gas species, most notably CO, are found with either rotation (a severe problem with previous designs employing gear trains) or heating.
|Item Type:||Journal Item|
|Subjects:||T Technology > TA Engineering (General). Civil engineering (General)
Q Science > QC Physics
|Journal or Publication Title:||JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS|
|Publisher:||AMER INST PHYSICS|
|Official Date:||September 1991|
|Number of Pages:||2|
|Page Range:||pp. 2797-2798|
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