INTEGRATED TIN OXIDE ODOR SENSORS
UNSPECIFIED (1991) INTEGRATED TIN OXIDE ODOR SENSORS. SENSORS AND ACTUATORS B-CHEMICAL, 4 (1-2). pp. 117-121. ISSN 0925-4005Full text not available from this repository.
This paper describes the design and fabrication of an integrated array of tin oxide odour sensors using planar micro-electronic silicon technology. Some fundamental properties of the device structure are discussed, including power consumption, along with its response to several odours. In addition, the sensing element is modelled as a pair of finite coplanar electrodes lying upon a thin oxide layer, and an analytical conductance equation obtained that relates its conductance to electrode geometry in a diffusion-limited model. The physical conditions that require the use of a diffusion or reaction model are discussed.
|Item Type:||Journal Article|
|Subjects:||Q Science > QD Chemistry|
|Journal or Publication Title:||SENSORS AND ACTUATORS B-CHEMICAL|
|Publisher:||ELSEVIER SCIENCE SA LAUSANNE|
|Number of Pages:||5|
|Page Range:||pp. 117-121|
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