UNSPECIFIED (1991) INTEGRATED TIN OXIDE ODOR SENSORS. SENSORS AND ACTUATORS B-CHEMICAL, 4 (1-2). pp. 117-121. ISSN 0925-4005

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Abstract

This paper describes the design and fabrication of an integrated array of tin oxide odour sensors using planar micro-electronic silicon technology. Some fundamental properties of the device structure are discussed, including power consumption, along with its response to several odours. In addition, the sensing element is modelled as a pair of finite coplanar electrodes lying upon a thin oxide layer, and an analytical conductance equation obtained that relates its conductance to electrode geometry in a diffusion-limited model. The physical conditions that require the use of a diffusion or reaction model are discussed.

Item Type:	Journal Article
Subjects:	Q Science > QD Chemistry
Journal or Publication Title:	SENSORS AND ACTUATORS B-CHEMICAL
Publisher:	ELSEVIER SCIENCE SA LAUSANNE
ISSN:	0925-4005
Date:	May 1991
Volume:	4
Number:	1-2
Number of Pages:	5
Page Range:	pp. 117-121
Publication Status:	Published
URI:	http://wrap.warwick.ac.uk/id/eprint/22737

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