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MACHINING OF SILICON USING HIGH-SPEED MINIATURE DIAMOND CUTTERS
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UNSPECIFIED (1990) MACHINING OF SILICON USING HIGH-SPEED MINIATURE DIAMOND CUTTERS. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 23 (5). pp. 607-616. ISSN 0022-3727
Full text not available from this repository.| Item Type: | Journal Article |
|---|---|
| Subjects: | Q Science > QC Physics |
| Journal or Publication Title: | JOURNAL OF PHYSICS D-APPLIED PHYSICS |
| Publisher: | IOP PUBLISHING LTD |
| ISSN: | 0022-3727 |
| Date: | 14 May 1990 |
| Volume: | 23 |
| Number: | 5 |
| Number of Pages: | 10 |
| Page Range: | pp. 607-616 |
| Publication Status: | Published |
| URI: | http://wrap.warwick.ac.uk/id/eprint/23291 |
Data sourced from Thomson Reuters' Web of Knowledge
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