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AN APPARATUS FOR BATCH FABRICATION OF MICROMECHANICAL ELEMENTS BY ION-BEAM MACHINING
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UNSPECIFIED (1987) AN APPARATUS FOR BATCH FABRICATION OF MICROMECHANICAL ELEMENTS BY ION-BEAM MACHINING. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 5 (1). pp. 337-341. ISSN 1071-1023
Full text not available from this repository.| Item Type: | Journal Article |
|---|---|
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering T Technology Q Science > QC Physics |
| Journal or Publication Title: | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B |
| Publisher: | AMER INST PHYSICS |
| ISSN: | 1071-1023 |
| Date: | January 1987 |
| Volume: | 5 |
| Number: | 1 |
| Number of Pages: | 5 |
| Page Range: | pp. 337-341 |
| Publication Status: | Published |
| URI: | http://wrap.warwick.ac.uk/id/eprint/25212 |
Data sourced from Thomson Reuters' Web of Knowledge
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