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AN APPARATUS FOR BATCH FABRICATION OF MICROMECHANICAL ELEMENTS BY ION-BEAM MACHINING
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UNSPECIFIED (1987) AN APPARATUS FOR BATCH FABRICATION OF MICROMECHANICAL ELEMENTS BY ION-BEAM MACHINING. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 5 (1). pp. 337-341. ISSN 1071-1023.
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| Item Type: | Journal Article | ||||
|---|---|---|---|---|---|
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering T Technology Q Science > QC Physics |
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| Journal or Publication Title: | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | ||||
| Publisher: | AMER INST PHYSICS | ||||
| ISSN: | 1071-1023 | ||||
| Official Date: | January 1987 | ||||
| Dates: |
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| Volume: | 5 | ||||
| Number: | 1 | ||||
| Number of Pages: | 5 | ||||
| Page Range: | pp. 337-341 | ||||
| Publication Status: | Published |
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