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Accurate effective mobility extraction in SOI MOS transistors
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Thomas, S. M., Whall, Terry E., Parker, Evan H. C., Leadley, D. R. (David R.), Lander, R. J. P., Vellianitis, G. and Watling, J. R. (2009) Accurate effective mobility extraction in SOI MOS transistors. In: 10th International Conference on Ultimate Integration on Silicon, Aachen, Germany, March 18-20, 2009. Published in: ULIS 2009: 10th International Conference on Ultimate Integration of Silicon pp. 31-34. ISBN 978-1-4244-3705-4. doi:10.1109/ULIS.2009.4897532
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Official URL: http://dx.doi.org/10.1109/ULIS.2009.4897532
Abstract
Acurate effective mobility calculations of MOSFETs are necessary when assessing the importance of various performance limiting carrier scattering mechanisms. A novel and simple to use technique to correct for the absence of drain bias during the split CV measurement is presented. Its effectiveness is demonstrated by application to a quasiplanar SOI MOSFET at 300K and 4K. Also included are the lateral E-field and diffusion corrections which are commonly neglected. For the first time, the key equation for accurate mobility extraction is presented.
Item Type: | Conference Item (Paper) | ||||
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Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering T Technology > TA Engineering (General). Civil engineering (General) |
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Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||
Journal or Publication Title: | ULIS 2009: 10th International Conference on Ultimate Integration of Silicon | ||||
Publisher: | IEEE | ||||
ISBN: | 978-1-4244-3705-4 | ||||
Editor: | Mantl, S and Lemme, M and Schubert, J and Albrecht, W | ||||
Official Date: | 2009 | ||||
Dates: |
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Number of Pages: | 4 | ||||
Page Range: | pp. 31-34 | ||||
DOI: | 10.1109/ULIS.2009.4897532 | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Access rights to Published version: | Restricted or Subscription Access | ||||
Conference Paper Type: | Paper | ||||
Title of Event: | 10th International Conference on Ultimate Integration on Silicon | ||||
Type of Event: | Conference | ||||
Location of Event: | Aachen, Germany | ||||
Date(s) of Event: | March 18-20, 2009 |
Data sourced from Thomson Reuters' Web of Knowledge
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