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X-ray diffraction study of gold nitride films: Observation of a solid solution phase
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Alves, L., Hase, Thomas P. A., Hunt, M. R. C., Brieva, A. C. and Siller, L.. (2008) X-ray diffraction study of gold nitride films: Observation of a solid solution phase. Journal of Applied Physics, Vol.104 (No.11). article no. 113527. ISSN 0021-8979
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Official URL: http://dx.doi.org/10.1063/1.3040717
Abstract
The structure of nitride containing gold films produced by reactive ion sputtering and nitrogen plasma etching is investigated using x-ray photoelectron spectroscopy and x-ray diffraction. It is found that gold nitride is a solid solution of nitrogen atoms dissolved in a fcc gold matrix. Differences between the strain and lattice parameters of gold and gold nitride films were observed and are explained by interstitial nitrogen present in the latter. c 2008 American Institute of Physics. [DOI: 10.1063/1.3040717]
| Item Type: | Journal Article |
|---|---|
| Subjects: | Q Science > QC Physics Q Science > QD Chemistry |
| Divisions: | Faculty of Science > Physics |
| Library of Congress Subject Headings (LCSH): | X-rays -- Diffraction, Gold films, Solutions, Solid, Nitrides |
| Journal or Publication Title: | Journal of Applied Physics |
| Publisher: | American Institute of Physics |
| ISSN: | 0021-8979 |
| Official Date: | 1 December 2008 |
| Volume: | Vol.104 |
| Number: | No.11 |
| Number of Pages: | 5 |
| Page Range: | article no. 113527 |
| Identification Number: | 10.1063/1.3040717 |
| Status: | Peer Reviewed |
| Publication Status: | Published |
| Funder: | Engineering and Physical Sciences Research Council (EPSRC) |
| Grant number: | EP/C006011/1 (EPSRC) |
| URI: | http://wrap.warwick.ac.uk/id/eprint/28715 |
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