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Novel capacitive ultrasonic transducers fabricated using microstereolithography
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Bradley, R. J., Billson, Duncan R. and Hutchins, David A. (2006) Novel capacitive ultrasonic transducers fabricated using microstereolithography. In: IEEE Ultrasonics Symposium, Vancouver, Canada, 03-06 Oct 2006. Published in: IEEE International Ultrasonics Symposium. Proceedings pp. 2381-2384. ISBN 978-1-4244-0201-4. ISSN 1051-0117. doi:10.1109/ULTSYM.2006.469
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Abstract
Capacitive micromachined ultrasonic transducers (cMUTs) have been developed using microstereolithography fabrication with architectures comprised entirely of partially metalised photopolymer. These devices derive considerable advantages from rapid prototyping technology, in that they are cheap to produce, and benefit from the design-to-product lead times inherent in the production of components using stereolithography. To date membranes have been produced with thicknesses ranging from 30 to 90 pm with aspect ratios in the order of 100 - 1000. These devices have been shown to operate both as transmitters and as receivers of ultrasound in air and water. In air, they have a bandwidth approaching 100 % with a centre frequency of 100 kHz. Operation in water at frequencies of up to 5 MHz has also been demonstrated.
| Item Type: | Conference Item (Paper) | ||||
|---|---|---|---|---|---|
| Subjects: | T Technology > TA Engineering (General). Civil engineering (General) T Technology > TK Electrical engineering. Electronics Nuclear engineering Q Science > QC Physics |
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| Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
| Series Name: | ULTRASONICS SYMPOSIUM | ||||
| Journal or Publication Title: | IEEE International Ultrasonics Symposium. Proceedings | ||||
| Publisher: | IEEE | ||||
| ISBN: | 978-1-4244-0201-4 | ||||
| ISSN: | 1051-0117 | ||||
| Official Date: | 2006 | ||||
| Dates: |
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| Number of Pages: | 4 | ||||
| Page Range: | pp. 2381-2384 | ||||
| DOI: | 10.1109/ULTSYM.2006.469 | ||||
| Status: | Peer Reviewed | ||||
| Publication Status: | Published | ||||
| Access rights to Published version: | Restricted or Subscription Access | ||||
| Conference Paper Type: | Paper | ||||
| Title of Event: | IEEE Ultrasonics Symposium | ||||
| Type of Event: | Other | ||||
| Location of Event: | Vancouver, Canada | ||||
| Date(s) of Event: | 03-06 Oct 2006 |
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