Maeng, Sunglyul, Guha, Prasanta K., Udrea, Florin, Ali, Syed Z., Santra, Sumita, Gardner, J. W. (Julian W.), 1958-, Park, Jonghyurk, Kim, Sang-Hyeob, Moon, Seung Eon, Park, Kang-Ho, Kim, Jong-Dae, Choi, Youngjin and Milne, W. I. (William I.). (2008) SOI CMOS-based smart gas sensor system for ubiquitous sensor networks. ETRI Journal, Vol.30 (No.4). pp. 516-525. ISSN 1225-6463

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Abstract

This paper proposes a compact, energy-efficient, and smart gas sensor platform technology for ubiquitous sensor network (USN) applications. The compact design of the platform is realized by employing silicon-on-insulator (SOI) technology. The sensing element is fully integrated with SOI CMOS circuits for signal processing and communication. Also, the micro-hotplate operates at high temperatures with extremely low power consumption, which is important for USN applications. ZnO nanowires are synthesized onto the micro-hotplate by a simple hydrothermal process and are patterned by a lift-off to form the gas sensor. The sensor was operated at 200 degrees C and showed a good response to 100 ppb NO2 gas.

Item Type:	Journal Article
Subjects:	T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions:	Faculty of Science > Engineering
Library of Congress Subject Headings (LCSH):	Silicon-on-insulator technology, Gas detectors, Metal oxide semiconductors, Complementary, Microelectromechanical systems, Zinc oxide -- Thermal properties
Journal or Publication Title:	ETRI Journal
Publisher:	Electronics and Telecommunications Research Institute
ISSN:	1225-6463
Date:	August 2008
Volume:	Vol.30
Number:	No.4
Number of Pages:	10
Page Range:	pp. 516-525
Identification Number:	10.4218/etrij.08.0108.0101
Status:	Peer Reviewed
Publication Status:	Published
Access rights to Published version:	Open Access
Funder:	Korea (South). Chŏngbo T'ongsinbu [Korea (South). Ministry of Information and Communication]
Grant number:	2006-S-006-02 (MIC)
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URI:	http://wrap.warwick.ac.uk/id/eprint/29545

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