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Anomalous Ge diffusion effects during Ge-condensation
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Beer, C. (Chris), Whall, Terry E., Morris, R. J. H. (Richard J. H.), Parker, Evan H. C. and Leadley, D. R. (David R.) (2008) Anomalous Ge diffusion effects during Ge-condensation. In: 9th International Conference on Ultimate Integration on Silicon, Univ Udine, Udine, Italy, Mar 13-14, 2008. Published in: ULIS 2008: Proceedings of the 9th International Conference on Ultimate Integration on Silicon pp. 207-210. ISBN 978-1-4244-1729-2. doi:10.1109/ULIS.2008.4527175
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Abstract
Thin Si0.88Ge0.12 layers were grown by LP-CVD on thick (100 nm) silicon-on-insulator for Ge condensation studies. A series of oxidations was carried out to reveal aspects of the Ge condensation process and the final structures were characterised by SIMS and X-TEM. The SIMS data showed that during the early stages, Ge diffuses through the buried oxide (BOX) and accumulates in the underlying Si-substrate. Intriguingly, as the condensation process continues this Ge appears to be re-incorporated into condensed layer above the BOX. We suggest a possible mechanism to account for this phenomenon.
Item Type: | Conference Item (UNSPECIFIED) | ||||
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Subjects: | Q Science > QC Physics Q Science > QD Chemistry |
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Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||
Library of Congress Subject Headings (LCSH): | Condensation, Condensation products (Chemistry), Germanium, Diffusion | ||||
Journal or Publication Title: | ULIS 2008: Proceedings of the 9th International Conference on Ultimate Integration on Silicon | ||||
Publisher: | IEEE | ||||
ISBN: | 978-1-4244-1729-2 | ||||
Editor: | Esseni, D and Palestri, P and Selmi, L | ||||
Official Date: | 2008 | ||||
Dates: |
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Number of Pages: | 4 | ||||
Page Range: | pp. 207-210 | ||||
DOI: | 10.1109/ULIS.2008.4527175 | ||||
Status: | Not Peer Reviewed | ||||
Publication Status: | Published | ||||
Access rights to Published version: | Restricted or Subscription Access | ||||
Title of Event: | 9th International Conference on Ultimate Integration on Silicon | ||||
Type of Event: | Conference | ||||
Location of Event: | Univ Udine, Udine, Italy | ||||
Date(s) of Event: | Mar 13-14, 2008 |
Data sourced from Thomson Reuters' Web of Knowledge
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