The Library
Characterisation of sol-gel prepared (HfO2)(x)(SiO2)(1-x) (x=0.1, 0.2 and 0.4) by H-1, C-13, O-17 and Si-29 MAS NMR, FTIR and TGA
Tools
Tools
Tools
O'Dell, Luke A., Gunawidjaja, Philips N., Holland, Mark A., Mountjoy, Gavin, Pickup, Dave M., Newport, Robert J. and Smith, Mark E. (2008) Characterisation of sol-gel prepared (HfO2)(x)(SiO2)(1-x) (x=0.1, 0.2 and 0.4) by H-1, C-13, O-17 and Si-29 MAS NMR, FTIR and TGA. Solid State Nuclear Magnetic Resonance, Vol.33 (No.1-2). pp. 16-24. doi:10.1016/j.ssnmr.2007.11.001
Research output not available from this repository, contact author.
Official URL: http://dx.doi.org/10.1016/j.ssnmr.2007.11.001
Abstract
The HfO2-SiO2 system is attracting interest as a possible new dielectric material in semiconductor devices. Knowledge of the location of hafnium within the silica network and the effect hafnium has on the structure will be central to the successful use of this material system in this application. Here, sol-gel techniques have been used to manufacture (HfO2)(x)(SiO2)(1-x) samples (x = 0.1, 0.2 and 0.4, each heat treated at 250, 500 and 750 degrees C) and these have been characterised by magic angle spinning (MAS) NMR (H-1, C-13, O-17, Si-29), Fourier transform infrared spectroscopy (FTIR) and thermogravimetric analysis. 29Si MAS NMR showed that increasing the hafnia content decreases the connectivity of the silicate network, i.e. increases the range of differently connected SiO4 (Q(n)) units with more having increased numbers of non-bridging oxygens (i.e. lower n). FTIR and O-17 MAS NMR showed unequivocally that the x = 0.4 sample phase-separated at higher temperatures, while in the x = 0.1 sample the hafnium was homogeneously mixed into the SiO2 phase without any phase separation. (C) 2007 Elsevier Inc. All rights reserved.
| Item Type: | Journal Article | ||||
|---|---|---|---|---|---|
| Subjects: | Q Science > QD Chemistry Q Science > QC Physics |
||||
| Divisions: | Administration > Vice Chancellor's Office Faculty of Science > Physics |
||||
| Library of Congress Subject Headings (LCSH): | Colloids, Nuclear magnetic resonance spectroscopy, Fourier transform infrared spectroscopy, Thermogravimetry, Hafnium oxide, Silica | ||||
| Journal or Publication Title: | Solid State Nuclear Magnetic Resonance | ||||
| Publisher: | Academic Press | ||||
| ISSN: | 0926-2040 | ||||
| Official Date: | January 2008 | ||||
| Dates: |
|
||||
| Volume: | Vol.33 | ||||
| Number: | No.1-2 | ||||
| Number of Pages: | 9 | ||||
| Page Range: | pp. 16-24 | ||||
| DOI: | 10.1016/j.ssnmr.2007.11.001 | ||||
| Status: | Peer Reviewed | ||||
| Publication Status: | Published | ||||
| Access rights to Published version: | Restricted or Subscription Access | ||||
| Funder: | Engineering and Physical Sciences Research Council (EPSRC) |
Data sourced from Thomson Reuters' Web of Knowledge
Request changes or add full text files to a record
Repository staff actions (login required)
 |
View Item |
