The Library
Comparison of LiNbO3 flux systems for deposition on RIE-etched LiTaO3 substrates
Tools
Tools
Tools
Marshall, Jessica M., Walker, David, Thomas, Pam A., Dobedoe, R. S., Ren, Z. and Yu, S. (2007) Comparison of LiNbO3 flux systems for deposition on RIE-etched LiTaO3 substrates. Journal of Physics D: Applied Physics, 40 (23). pp. 7480-7484. doi:10.1088/0022-3727/40/23/034 ISSN 0022-3727.
Research output not available from this repository.
Request-a-Copy directly from author or use local Library Get it For Me service.
Official URL: http://dx.doi.org/10.1088/0022-3727/40/23/034
Abstract
Single-crystal LiNbO3 films were deposited by liquid phase epitaxy (LPE) onto inductively coupled plasma-assisted reactive ion etched (RIE) LiTaO3 substrates. The RIE-etched channels were 6 mu m wide by 0.9 mu m deep. Surface roughness at the bottom of trenches was 100 nm or better with sidewall roughness below detection limits. This study also compares the suitability of the LiBO2 - LiNbO3 and the LiVO3 - LiNbO3 flux systems. From high-resolution x-ray diffraction and scanning electron microscopy (SEM) data, LiBO2 - LiNbO3 was determined to be the superior flux system with respect to diffraction profile widths of the 0 0 12 reflection. Films grown from boron-based flux were observed to have narrower x-ray rocking curve widths than films grown from vanadium-based flux, with typical values of the FWHM of 0.018 degrees and 0.041 degrees, respectively. Boron-based LPE was then used to deposit LiNbO3 film onto (RIE) LiTaO3 substrates. SEM imaging and energy dispersive x-ray analysis showed a sharp composition change between film and substrate indicative of a step index change suitable for waveguiding.
| Item Type: | Journal Article | ||||
|---|---|---|---|---|---|
| Subjects: | Q Science > QC Physics | ||||
| Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||
| Journal or Publication Title: | Journal of Physics D: Applied Physics | ||||
| Publisher: | IOP Publishing | ||||
| ISSN: | 0022-3727 | ||||
| Official Date: | 16 November 2007 | ||||
| Dates: |
|
||||
| Volume: | 40 | ||||
| Number: | 23 | ||||
| Number of Pages: | 5 | ||||
| Page Range: | pp. 7480-7484 | ||||
| DOI: | 10.1088/0022-3727/40/23/034 | ||||
| Status: | Peer Reviewed | ||||
| Publication Status: | Published | ||||
| Access rights to Published version: | Restricted or Subscription Access |
Data sourced from Thomson Reuters' Web of Knowledge
Request changes or add full text files to a record
Repository staff actions (login required)
 |
View Item |
