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TiNi shape memory alloys for MEMS : thin film deposition, thermophysical properties and laser micromachining characteristics
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Davies, Sam T. (2007) TiNi shape memory alloys for MEMS : thin film deposition, thermophysical properties and laser micromachining characteristics. In: 5th International Conference on Processing and Manufacturing of Advanced Materials, Vancouver, Canada, 04-08 Jul 2006. Published in: Materials Science Forum, 539-543 (Part 1-5). pp. 3151-3156. ISBN 9780878494286. ISSN 1662-9752.
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Official URL: http://dx.doi.org/10.4028/www.scientific.net/MSF.5...
Abstract
The growth of TiNi thin films by ion beam sputter deposition using a Kaufmann type ion source is described. Argon ions are used to sputter separate Ti and Ni targets to deposit nearequiatomic TiNi thin films. Typically, ion energies and current densities of 1500 eV and 1 mA cm(-2) respectively are used, with an argon overpressure of around 0.05 mtorr, to achieve deposition rates of order 1 mu m hr(-1), The thermophysical properties of the deposited films were investigated by thermal imaging. Patterning of TiNi films and foils with micrometre resolution using KrF excimer laser ablation at 248 nm wavelength, with beam fluence up to 2.5 J cm(-2), 15 ns pulse duration and pulse rates up to 100 Hz has also been investigated.
Item Type: | Conference Item (Paper) | ||||
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Subjects: | T Technology > TA Engineering (General). Civil engineering (General) | ||||
Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
Series Name: | MATERIALS SCIENCE FORUM | ||||
Journal or Publication Title: | Materials Science Forum | ||||
Publisher: | Trans Tech Publications Ltd. | ||||
ISBN: | 9780878494286 | ||||
ISSN: | 1662-9752 | ||||
Editor: | Chandra, T and Tsuzaki, K and Militzer, M and Ravindran, C | ||||
Official Date: | March 2007 | ||||
Dates: |
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Volume: | 539-543 | ||||
Number: | Part 1-5 | ||||
Number of Pages: | 6 | ||||
Page Range: | pp. 3151-3156 | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Access rights to Published version: | Restricted or Subscription Access | ||||
Conference Paper Type: | Paper | ||||
Title of Event: | 5th International Conference on Processing and Manufacturing of Advanced Materials | ||||
Type of Event: | Conference | ||||
Location of Event: | Vancouver, Canada | ||||
Date(s) of Event: | 04-08 Jul 2006 |
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