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Low temperature performance of deep submicron germanium pMOSFETs
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Dobbie, A. (Andrew), Nicholas, Gareth, Meuris, Marc, Parker, Evan H. C. and Whall, Terry E. (2007) Low temperature performance of deep submicron germanium pMOSFETs. In: International Workshop on Electron Devices and Semiconductor Technology, Tsinghua Univ, Beijing, China, 03-04 Jun 2007. Published in: Proceeding of 2007 International Workshop on Electron Devices and Semiconductor Technology, 2007. EDST 2007. pp. 62-65. ISBN 1424410983.
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Official URL: http://dx.doi.org/10.1109/EDST.2007.4289778
Abstract
The electrical characteristics of germanium (Ge) pMOSFETs with high-kappa dielectric and gate lengths down to 125nm have been studied as a function of temperature down to 77K. The effective hole mobility improves from 235cm(2)/Vs at room temperature to 490cm(2)/Vs at 77K due to the reduction of phonon scattering. We report a drive current enhancement of 1001 mu A/mu m at 295K to 1394 mu A/mu m at 77K for L = 125nm and V-G - V-T = V-D = -1.5V and a reduction in the off-current by 1-2 decades. The decrease in the subthreshold slope from 100mV/dec to 37mV/dec at 77K would allow power supply voltage scaling, further reducing the off-state current, and malcing Ge transistors suitable candidates for low temperature CMOS applications.
Item Type: | Conference Item (UNSPECIFIED) | ||||
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Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering | ||||
Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||
Journal or Publication Title: | Proceeding of 2007 International Workshop on Electron Devices and Semiconductor Technology, 2007. EDST 2007. | ||||
Publisher: | IEEE | ||||
ISBN: | 1424410983 | ||||
Official Date: | 2007 | ||||
Dates: |
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Number of Pages: | 4 | ||||
Page Range: | pp. 62-65 | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Title of Event: | International Workshop on Electron Devices and Semiconductor Technology | ||||
Type of Event: | Workshop | ||||
Location of Event: | Tsinghua Univ, Beijing, China | ||||
Date(s) of Event: | 03-04 Jun 2007 |
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