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Novel design and characterisation of SOICMOS micro-hotplates for high temperature gas sensors
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Guha, Prasanta K., Ali, Syed Z., Lee, C. C. C., Udrea, Florin, Milne, W. I., Iwaki, T., Covington, James A. and Gardner, J. W. (2007) Novel design and characterisation of SOICMOS micro-hotplates for high temperature gas sensors. In: 20th European Conference on Solid-State Transducers, Goteborg, Sweden, 17-20 Sep 2006. Published in: Sensors and Actuators B-Chemical, Vol.127 (No.1). pp. 260-266. doi:10.1016/j.snb.2007.07.047 ISSN 0925-4005.
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Official URL: http://dx.doi.org/10.1016/j.snb.2007.07.047
Abstract
This paper describes the design and characterisation of a new generation of fully CMOS compatible novel micro-hotplates for high temperature gas sensors. The micro-hotplates employ advanced MOSFET heaters embedded in an Sol membrane. The heaters can operate at a ground-breaking high temperature of 550 degrees C for an ultra-low power consumption of 16 mW (continuous operation) and have a thermal rise time of below 10 ms. A large number of devices have been characterised over a batch of wafers and they show excellent reproducibility and reliability. The yield of the micro-hotplates after deep RIE back-etching was close to 90% while the residual stress was found to be minimal, resulting in fiat and stable membranes. Electronic circuits for drive and readout have also been designed and integrated with the micro-hotplates to create a smart gas sensor.
| Item Type: | Conference Item (Paper) | ||||
|---|---|---|---|---|---|
| Subjects: | Q Science > QD Chemistry | ||||
| Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
| Journal or Publication Title: | Sensors and Actuators B-Chemical | ||||
| Publisher: | Elsevier Science | ||||
| ISSN: | 0925-4005 | ||||
| Official Date: | 20 October 2007 | ||||
| Dates: |
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| Volume: | Vol.127 | ||||
| Number: | No.1 | ||||
| Number of Pages: | 7 | ||||
| Page Range: | pp. 260-266 | ||||
| DOI: | 10.1016/j.snb.2007.07.047 | ||||
| Status: | Peer Reviewed | ||||
| Publication Status: | Published | ||||
| Access rights to Published version: | Restricted or Subscription Access | ||||
| Conference Paper Type: | Paper | ||||
| Title of Event: | 20th European Conference on Solid-State Transducers | ||||
| Type of Event: | Conference | ||||
| Location of Event: | Goteborg, Sweden | ||||
| Date(s) of Event: | 17-20 Sep 2006 |
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