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New Cs sputter ion source with polyatomic ion beams for secondary ion mass spectrometry applications
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Belykh, S. F., Palitsin, V. V., Veryovkin, I. V., Kovarsky, A. P., Chang, R. J. H., Adriaens, A. (Annemie), Dowsett, M. G. and Adams, F. (2007) New Cs sputter ion source with polyatomic ion beams for secondary ion mass spectrometry applications. Review of Scientific Instruments, Vol.78 (No.8). Article: 085101. doi:10.1063/1.2761021 ISSN 0034-6748.
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Official URL: http://dx.doi.org/10.1063/1.2761021
Abstract
A simple design for a cesium sputter ion source compatible with vacuum and ion-optical systems as well as with electronics of the commercially available Cameca IMS-4f instrument is reported. This ion source has been tested with the cluster primary ions of Si-n(-) and Cu-n(-). Our experiments with surface characterization and depth profiling conducted to date demonstrate improvements of the analytical capabilities of the secondary ion mass spectrometry instrument due to the nonadditive enhancement of secondary ion emission and shorter ion ranges of polyatomic projectiles compared to atomic ones with the same impact energy.
Item Type: | Journal Article | ||||
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Subjects: | Q Science > QC Physics | ||||
Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||
Journal or Publication Title: | Review of Scientific Instruments | ||||
Publisher: | American Institute of Physics | ||||
ISSN: | 0034-6748 | ||||
Official Date: | August 2007 | ||||
Dates: |
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Volume: | Vol.78 | ||||
Number: | No.8 | ||||
Number of Pages: | 9 | ||||
Page Range: | Article: 085101 | ||||
DOI: | 10.1063/1.2761021 | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Access rights to Published version: | Restricted or Subscription Access | ||||
Funder: | NATO, Belgian Federal Services for Scientific, Technical, and Cultural Affairs, EPSRC | ||||
Grant number: | SfP Project No. 97-1929; DWTC/SSTC; GR/S78919/01 |
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