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Stylus contact on short wavelength random surfaces: a simulation study
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Tian, Ailing, Liu, X., Chetwynd, D. G. and Cai, Zhijian (2007) Stylus contact on short wavelength random surfaces: a simulation study. Measurement Science & Technology, Vol.18 (No.6). pp. 1694-1702. doi:10.1088/0957-0233/18/6/S05 ISSN 0957-0233.
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Official URL: http://dx.doi.org/10.1088/0957-0233/18/6/S05
Abstract
Stylus scanning remains a crucial method in surface micro- and nano-topography measurement. Its accuracy, especially at shorter wavelengths, depends on the relation of the stylus geometry to surface parameters. We present a 3D computer simulation of measuring non-Gaussian random surfaces with arbitrary tip shapes, studying both the surface distortion and the stylus contact distribution. After a brief discussion of the surface generation and geometrical contact algorithms, this paper concentrates on examples of symmetrical styli having characteristic sizes not much smaller than the surface correlation lengths. It thus attempts to examine the breakdown region as we seek to measure finer topographies. The measuring error appears to be generally smaller with a three-pyramid stylus than with other styli as limits are approached. Perhaps counter-intuitively, the errors in common parameters on surfaces of a similar correlation length and roughness amplitude can be smaller when their kurtosis is high, a condition that might become more common with deliberately imposed nanostructuring.
| Item Type: | Journal Article | ||||
|---|---|---|---|---|---|
| Subjects: | T Technology > TA Engineering (General). Civil engineering (General) | ||||
| Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
| Journal or Publication Title: | Measurement Science & Technology | ||||
| Publisher: | Institute of Physics Publishing Ltd. | ||||
| ISSN: | 0957-0233 | ||||
| Official Date: | June 2007 | ||||
| Dates: |
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| Volume: | Vol.18 | ||||
| Number: | No.6 | ||||
| Number of Pages: | 9 | ||||
| Page Range: | pp. 1694-1702 | ||||
| DOI: | 10.1088/0957-0233/18/6/S05 | ||||
| Status: | Peer Reviewed | ||||
| Publication Status: | Published | ||||
| Access rights to Published version: | Restricted or Subscription Access | ||||
| Title of Event: | 4th International Symposium on Instrumentation Science and Technology | ||||
| Location of Event: | Harbin, People's Republic of China | ||||
| Date(s) of Event: | August 2006 |
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