Davis, L. A. J., Hutchins, David A. and Noble, Russell A. (2007) Characterization of cMUTs in rarefied gases. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol.54 (No.5). pp. 1065-1071. doi:10.1109/TUFFC.2007.352 ISSN 0885-3010.

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Abstract

The performance of capacitive micromachined ultrasonic transducers (cMUTs) was investigated at low pressures in various gases such as air, carbon dioxide, and helium. The aim was to replicate the pressure conditions likely to meet on the surface of other planets such as Mars, where ultrasonic wind velocity measurements might be possible. It is demonstrated that cMUTs are capable of operating at low pressures, and the response to pressures below terrestrial atmospheric values is observed experimentally and compared to theoretical predictions. The center frequency of operation and sensitivity are both observed to be affected by changing pressures.

Item Type:	Journal Article
Subjects:	T Technology > TA Engineering (General). Civil engineering (General) T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions:	Faculty of Science, Engineering and Medicine > Engineering > Engineering
Journal or Publication Title:	IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
Publisher:	IEEE
ISSN:	0885-3010
Official Date:	May 2007
Dates:	Date Event May 2007 Published
Volume:	Vol.54
Number:	No.5
Number of Pages:	7
Page Range:	pp. 1065-1071
DOI:	10.1109/TUFFC.2007.352
Status:	Peer Reviewed
Publication Status:	Published
Access rights to Published version:	Restricted or Subscription Access

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