The Library
Topographical evolution of sputtered chromium nitride thin films
Tools
Tools
Tools
Gerbig, Yvonne B., Spassov, V., Savan, A. and Chetwynd, D. G. (2007) Topographical evolution of sputtered chromium nitride thin films. Thin Solid Films, Vol.515 (No.5). pp. 2903-2920. doi:10.1016/j.tsf.2006.08.031 ISSN 0040-6090.
Research output not available from this repository.
Request-a-Copy directly from author or use local Library Get it For Me service.
Official URL: http://dx.doi.org/10.1016/j.tsf.2006.08.031
Abstract
The modification of the morphology, with special emphasis on the topographical evolution, of chromium nitride thin films has been studied by varying the sputter power, bias voltage, temperature, total pressure and Ar/N-2 ratio in an unbalanced magnetron sputtering process. Six different topography types (here designated pyramid, grain, crater, cone, ribbon and hillock) were identified. The growth conditions for each topography type are specified and summarized in a topography zone model showing the occurrence of each as function of temperature, Ar/N-2 ratio, deposition rate and bias voltage. Furthermore, the relationship between the size of the topographical features and the deposition parameters was investigated and is reported in detail. The control of topographical type and feature size appears sufficient to hold promise of generating topographies designed for specific functions.
| Item Type: | Journal Article | ||||
|---|---|---|---|---|---|
| Subjects: | T Technology > TA Engineering (General). Civil engineering (General) Q Science > QC Physics |
||||
| Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
| Journal or Publication Title: | Thin Solid Films | ||||
| Publisher: | Elsevier S.A. | ||||
| ISSN: | 0040-6090 | ||||
| Official Date: | 24 January 2007 | ||||
| Dates: |
|
||||
| Volume: | Vol.515 | ||||
| Number: | No.5 | ||||
| Number of Pages: | 18 | ||||
| Page Range: | pp. 2903-2920 | ||||
| DOI: | 10.1016/j.tsf.2006.08.031 | ||||
| Status: | Peer Reviewed | ||||
| Publication Status: | Published | ||||
| Access rights to Published version: | Restricted or Subscription Access |
Data sourced from Thomson Reuters' Web of Knowledge
Request changes or add full text files to a record
Repository staff actions (login required)
 |
View Item |
