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The characterisation of cMUTs at low gas pressures

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UNSPECIFIED (2005) The characterisation of cMUTs at low gas pressures. In: IEEE International Ultrasonics Symposium, SEP 18-21, 2005, Rotterdam, NETHERLANDS.

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Abstract

This paper describes ultrasonic measurements in gases at low pressures, using a vacuum chamber into which various gases could be introduced. cMUTs with different membrane thicknesses and surface areas were used to propagate signals from one device to another, so that propagation in environments likely to be met on the surface of Mars, namely low pressure carbon dioxide, could be evaluated. The experiments indicated that, as expected, the centre frequency of cMUT operation reduced with pressure. However, it was also shown that signals could be propagated through other gases such as air and helium at very low pressures, down to values below 10 mbar. The results are shown to agree with analytical models, which predict the behaviour of the cMUTs as a function of pressure.

Item Type: Conference Item (UNSPECIFIED)
Subjects: T Technology > TA Engineering (General). Civil engineering (General)
R Medicine
Q Science > QC Physics
Series Name: ULTRASONICS SYMPOSIUM
Journal or Publication Title: 2005 IEEE Ultrasonics Symposium, Vols 1-4
Publisher: IEEE
ISBN: 0-7803-9382-1
ISSN: 1051-0117
Date: 2005
Number of Pages: 4
Page Range: pp. 1937-1940
Publication Status: Published
Title of Event: IEEE International Ultrasonics Symposium
Location of Event: Rotterdam, NETHERLANDS
Date(s) of Event: SEP 18-21, 2005
URI: http://wrap.warwick.ac.uk/id/eprint/32650

Data sourced from Thomson Reuters' Web of Knowledge

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