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InN: Fermi level stabilization by low-energy ion bombardment
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Piper, L. F. J., Veal, T. D. (Tim D.), McConville, C. F. (Chris F.), Lu, H. and Schaff, W. J. (2006) InN: Fermi level stabilization by low-energy ion bombardment. In: 6th International Conference on Nitride Semiconductors (ICNS-6), Bremen, GERMANY, AUG 28-SEP 02, 2005. Published in: Physica Status Solidi C - Current Topics in Solid State Physics, Vol 3, No 6, 3 (6). pp. 1841-1845. ISBN *************. doi:10.1002/pssc.200565104 ISSN 1610-1634.
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Official URL: http://dx.doi.org/10.1002/pssc.200565104
Abstract
The near-surface electronic properties of InN have been investigated with high-resolution electron-energy-loss spectroscopy. Low-energy (similar to 400 eV) nitrogen ion bombardment followed by low temperature annealing (< 300 degrees C) was found to dramatically increase the n-type conductivity of InN, close to the surface. This is explained in terms of the formation of amphoteric defects from the ion bombardment and annealing combined with the band structure of InN. Low-energy ion bombardment and annealing is shown to result in a damage-induced, donor-like defect-profile instead of the expected electron accumulation for InN. (c) 2006 WILEYNCH Verlag GmbH & Co. KGaA, Weinheim.
Item Type: | Conference Item (UNSPECIFIED) | ||||
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Subjects: | Q Science > QC Physics | ||||
Series Name: | PHYSICA STATUS SOLIDI C-CURRENT TOPICS IN SOLID STATE PHYSICS | ||||
Journal or Publication Title: | Physica Status Solidi C - Current Topics in Solid State Physics, Vol 3, No 6 | ||||
Publisher: | WILEY-VCH, INC | ||||
ISBN: | ************* | ||||
ISSN: | 1610-1634 | ||||
Editor: | Hildebrandt, S and Stutzmann, M | ||||
Official Date: | 2006 | ||||
Dates: |
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Volume: | 3 | ||||
Number: | 6 | ||||
Number of Pages: | 5 | ||||
Page Range: | pp. 1841-1845 | ||||
DOI: | 10.1002/pssc.200565104 | ||||
Publication Status: | Published | ||||
Title of Event: | 6th International Conference on Nitride Semiconductors (ICNS-6) | ||||
Location of Event: | Bremen, GERMANY | ||||
Date(s) of Event: | AUG 28-SEP 02, 2005 |
Data sourced from Thomson Reuters' Web of Knowledge
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