Zhang, D., Chetwynd, D. G., Liu, Xianping and Tian, Yanling (2006) Investigation of a 3-DOF micro-positioning table for surface grinding. International Journal of Mechanical Sciences, 48 (12). pp. 1401-1408. doi:10.1016/j.ijmecsci.2006.07.006

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Abstract

A novel three degree of freedom numerically controlled micro-positioning table has been developed, optimized for applications such as improving the machining precision of precision grinders. The table consists of a moving platform, coupled to a base, three piezoelectric actuators and three capacitive sensors. An elastic structure with three notch-type flexure hinges both guides the platform and generates a preload for the piezoelectric actuators. The dimensions of the platform and flexure hinges and the position of flexure hinges are designed with the aid of finite element modeling to provide good stiffness with little bending deformation of the platform. The inverse model of the table is developed for numerical control. Experimental results are compared to the model predictions. The table has a natural frequency of 584 Hz, a resolution of 6 nm, an open loop control stiffness of 104 N/mu m at the center of the moving platform and a closed loop control stiffness of 650 N/mu m across the working area of the table.

Item Type:	Journal Article
Subjects:	T Technology > TJ Mechanical engineering and machinery
Divisions:	Faculty of Science > Engineering
Journal or Publication Title:	International Journal of Mechanical Sciences
Publisher:	Pergamon Press
ISSN:	0020-7403
Official Date:	2006
Dates:	Date Event 2006 Published
Volume:	48
Number:	12
Number of Pages:	8
Page Range:	pp. 1401-1408
DOI:	10.1016/j.ijmecsci.2006.07.006
Status:	Peer Reviewed
Publication Status:	Published

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