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Different optical conductivity enhancement (OCE) protocols to eliminate charging during ultra low energy SIMS profiling of semiconductor and semi-insulating materials
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Morris, R. J. H. (Richard J. H.), Dowsett, M. G. and Chang, R. J. H. (2006) Different optical conductivity enhancement (OCE) protocols to eliminate charging during ultra low energy SIMS profiling of semiconductor and semi-insulating materials. In: 15th International Conference on Secondary Ion Mass Spectrometry (SIMS XV), Univ Manchester, Manchester, 12-16 Sep 2005. Published in: Applied Surface Science, Volume 252 (Number 19 ). pp. 7221-7223. doi:10.1016/j.apsusc.2006.02.143 ISSN 0169-4332.
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Official URL: http://dx.doi.org/10.1016/j.apsusc.2006.02.143
Abstract
This work shows how the surface potential instabilities observed during uleSIMS profiling of various semiconductor and semi-insulating materials can be overcome by using coincident bombardment with laser light to excite electron-hole pairs. We show that the causes of the problem differ according to the material system, and may sometimes be due to the material alone, or to the interaction between the material and the primary ion beam. In some cases (e.g. Si1-xGex, phosphorus implanted silicon) it is sufficient to irradiate the SIMS crater with a photon flux density above some threshold determined by the primary ion current. In others, the laser irradiation pattern must be tailored so as to create a conducting path from the crater to the sample holder. (c) 2006 Elsevier B.V. All rights reserved.
Item Type: | Conference Item (Paper) | ||||
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Subjects: | Q Science > QD Chemistry T Technology > TA Engineering (General). Civil engineering (General) Q Science > QC Physics |
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Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||
Journal or Publication Title: | Applied Surface Science | ||||
Publisher: | Elsevier BV | ||||
ISSN: | 0169-4332 | ||||
Official Date: | 30 July 2006 | ||||
Dates: |
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Volume: | Volume 252 | ||||
Number: | Number 19 | ||||
Number of Pages: | 3 | ||||
Page Range: | pp. 7221-7223 | ||||
DOI: | 10.1016/j.apsusc.2006.02.143 | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Conference Paper Type: | Paper | ||||
Title of Event: | 15th International Conference on Secondary Ion Mass Spectrometry (SIMS XV) | ||||
Type of Event: | Conference | ||||
Location of Event: | Univ Manchester, Manchester | ||||
Date(s) of Event: | 12-16 Sep 2005 |
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