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Caesium sputter ion source compatible with commercial SIMS instruments
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Belikh, S. F., Palitsin, V., Veryovkin, I. V., Kovarsky, A. P., Chang, R. J. H., Adriaens, A. (Annemie), Dowsett, M. and Adams, F. (2006) Caesium sputter ion source compatible with commercial SIMS instruments. In: 15th International Conference on Secondary Ion Mass Spectrometry (SIMS XV), Univ Manchester, Manchester, 12-16 Sep 2005. Published in: Applied Surface Science, Volume 252 (Number 19 ). pp. 7321-7325. doi:10.1016/j.apsusc.2006.02.172 ISSN 0169-4332.
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Official URL: http://dx.doi.org/10.1016/j.apsusc.2006.02.172
Abstract
A simple design for a caesium sputter cluster ion source compatible with commercially available secondary ion mass spectrometers is reported. This source has been tested with the Cameca IMS 4f instrument using the cluster Si-n(-) and Cu-n(-) ions, and will shortly be retrofitted to the floating low energy ion gun (FLIG) of the type used on the Cameca 4500/4550 quadruple instruments. Our experiments with surface characterization and depth profiling conducted to date demonstrate improvements of analytical capabilities of the SIMS instrument due to the non-additive enhancement of secondary ion emission and shorter ion ranges of polyatomic projectiles compared to atomic ions with the same impact energy. (c) 2006 Elsevier B.V. All rights reserved.
Item Type: | Conference Item (Paper) | ||||
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Subjects: | Q Science > QD Chemistry T Technology > TA Engineering (General). Civil engineering (General) Q Science > QC Physics |
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Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||
Journal or Publication Title: | Applied Surface Science | ||||
Publisher: | Elsevier BV | ||||
ISSN: | 0169-4332 | ||||
Official Date: | 30 July 2006 | ||||
Dates: |
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Volume: | Volume 252 | ||||
Number: | Number 19 | ||||
Number of Pages: | 5 | ||||
Page Range: | pp. 7321-7325 | ||||
DOI: | 10.1016/j.apsusc.2006.02.172 | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Access rights to Published version: | Restricted or Subscription Access | ||||
Conference Paper Type: | Paper | ||||
Title of Event: | 15th International Conference on Secondary Ion Mass Spectrometry (SIMS XV) | ||||
Type of Event: | Conference | ||||
Location of Event: | Univ Manchester, Manchester | ||||
Date(s) of Event: | 12-16 Sep 2005 |
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