Jiang, X. and Whitehouse, D. (2006) Miniaturized optical measurement methods for surface nanometrology. In: 56th General Assembly of CIRP, Kobe, JAPAN, AUG 20-26, 2006. Published in: CIRP ANNALS-MANUFACTURING TECHNOLOGY, 55 (1). pp. 577-580.

Full text not available from this repository.

Abstract

This paper introduces some new types of optical surface measurement methods. One method uses spatial light-wave scanning to replace mechanical stylus scanning, and an optical fibre interferometer to replace optically bulky interferometers either of which are involved in almost all current surface measurement (stylus and optical) methods. The optical principle is based on measuring the phase shift of light reflected from the surface by using a combination of Wavelength/Frequency-Division-Multiplexing (WDM or FDM) and Fibre Bragg Grating (FBG) techniques. The WDM/FDM-FBG techniques provide the implementation of phase-to-depth and wavelength-to-field detection, and can offer a large dynamic measurement ratio (range/resolution) with a high signal-to-noise ratio (robustness).

Item Type:	Conference Item (UNSPECIFIED)
Subjects:	T Technology T Technology > TS Manufactures
Journal or Publication Title:	CIRP ANNALS-MANUFACTURING TECHNOLOGY
Publisher:	TECHNISCHE RUNDSCHAU EDITION COLIBRI LTD
ISSN:	0007-8506
Date:	2006
Volume:	55
Number:	1
Number of Pages:	4
Page Range:	pp. 577-580
Identification Number:	10.1016/S0007-8506(07)60486-7
Publication Status:	Published
Title of Event:	56th General Assembly of CIRP
Location of Event:	Kobe, JAPAN
Date(s) of Event:	AUG 20-26, 2006
URI:	http://wrap.warwick.ac.uk/id/eprint/33156

Data sourced from Thomson Reuters' Web of Knowledge

Request changes to a record

Actions (login required)

View Item