Miniaturized optical measurement methods for surface nanometrology
Jiang, X. and Whitehouse, D. J. (David J.) (2006) Miniaturized optical measurement methods for surface nanometrology. In: 56th General Assembly of CIRP, Kobe, JAPAN, AUG 20-26, 2006. Published in: CIRP ANNALS-MANUFACTURING TECHNOLOGY, 55 (1). pp. 577-580.Full text not available from this repository.
This paper introduces some new types of optical surface measurement methods. One method uses spatial light-wave scanning to replace mechanical stylus scanning, and an optical fibre interferometer to replace optically bulky interferometers either of which are involved in almost all current surface measurement (stylus and optical) methods. The optical principle is based on measuring the phase shift of light reflected from the surface by using a combination of Wavelength/Frequency-Division-Multiplexing (WDM or FDM) and Fibre Bragg Grating (FBG) techniques. The WDM/FDM-FBG techniques provide the implementation of phase-to-depth and wavelength-to-field detection, and can offer a large dynamic measurement ratio (range/resolution) with a high signal-to-noise ratio (robustness).
|Item Type:||Conference Item (UNSPECIFIED)|
T Technology > TS Manufactures
|Journal or Publication Title:||CIRP ANNALS-MANUFACTURING TECHNOLOGY|
|Publisher:||TECHNISCHE RUNDSCHAU EDITION COLIBRI LTD|
|Number of Pages:||4|
|Page Range:||pp. 577-580|
|Title of Event:||56th General Assembly of CIRP|
|Location of Event:||Kobe, JAPAN|
|Date(s) of Event:||AUG 20-26, 2006|
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