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Recent advances in traceable nanoscale dimension and force metrology in the UK
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Leach, Richard, Chetwynd, D. G., Blunt, L., Haycocks, Jane, Harris, Peter, Jackson, Keith, Oldfield, Simon and Reilly, Simon (2006) Recent advances in traceable nanoscale dimension and force metrology in the UK. In: 7th Symposium on Measurement Technology and Intelligent Instruments, University of Huddersfield, Huddersfield, England, Sep 06-08, 2005. Published in: Measurement Science & Technology, Vol.17 (No.3 Sp. Iss. SI). pp. 467-476. doi:10.1088/0957-0233/17/3/S02 ISSN 0957-0233.
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Official URL: http://dx.doi.org/10.1088/0957-0233/17/3/S02
Abstract
It is now fully appreciated that metrology will play an integral role in the successful development and commercialization of micro- and nanotechnology. To this end, the UK Government, through the National Measurement System, funded several groundbreaking projects in its 2002-2005 Programme for Length. This paper will briefly describe the background of the research, concentrating on the technical details of the projects. The Programme for Length normally only funds work into dimensional metrology but this funding cycle also funded work into low force metrology as this area is crucial to most mechanical probing techniques. The projects described include a traceable areal contacting instrument designed to calibrate areal transfer artefacts and hence offer traceability for industrial areal instruments, the production of the areal transfer artefacts, the development of Internet-based softgauges for profile parameters, a primary low force balance with a force resolution of 50 pN and the development of methods for measuring complex micro-scale structures. Amongst others, the projects involved collaboration with PTB, TNO, Taylor Hobson, AWE, Rubert & Co. and the Universities of Warwick, Huddersfield and Eindhoven.
| Item Type: | Conference Item (Paper) | ||||
|---|---|---|---|---|---|
| Subjects: | T Technology > TA Engineering (General). Civil engineering (General) | ||||
| Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
| Journal or Publication Title: | Measurement Science & Technology | ||||
| Publisher: | Institute of Physics Publishing Ltd. | ||||
| ISSN: | 0957-0233 | ||||
| Official Date: | March 2006 | ||||
| Dates: |
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| Volume: | Vol.17 | ||||
| Number: | No.3 Sp. Iss. SI | ||||
| Number of Pages: | 10 | ||||
| Page Range: | pp. 467-476 | ||||
| DOI: | 10.1088/0957-0233/17/3/S02 | ||||
| Status: | Peer Reviewed | ||||
| Publication Status: | Published | ||||
| Access rights to Published version: | Restricted or Subscription Access | ||||
| Conference Paper Type: | Paper | ||||
| Title of Event: | 7th Symposium on Measurement Technology and Intelligent Instruments | ||||
| Type of Event: | Other | ||||
| Location of Event: | University of Huddersfield, Huddersfield, England | ||||
| Date(s) of Event: | Sep 06-08, 2005 |
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