Mechanical systems in nanometre metrology
Smith, S. T. (Stuart T.), 1961- (1987) Mechanical systems in nanometre metrology. PhD thesis, University of Warwick.
WRAP_THESIS_Smith_1987.pdf - Submitted Version - Requires a PDF viewer such as GSview, Xpdf or Adobe Acrobat Reader
Official URL: http://webcat.warwick.ac.uk/record=b1452075~S1
The work reported in this thesis was carried out in the School of Engineering Science,
University of Warwick, between October 1984 and October 1987.
Chapter 1 contains a review of recent developments in instrumentation that require both
manipulation and measurement over the range 0.1-100nm. The instruments considered are the
Scanning Tunnelling Microscope (STM), Stylus techniques, X-ray interferometry and x-ray
microscopy. The rest of the thesis presents the design and assessment of a novel STM incorporating
an X-ray interferometer, an ultra-high precision stylus measuring instrument and an x-ray
microscope two axis specimen translation stage.
Chapters 2 and 3 present an assessment of different mechanisms for the production of rectilinear
motions having parasitic errors of better than mm. Theoretical and experimental investigations
into monolithic parallel spring systems based on a notch type hinge and long range slideways
based on a polymeric bearing sliding on a polished glass prism are presented. Optimisation
of a soleniod magnet force transducer is presented as a drive technique for the former device,
whilst a mechanically non-influencing feedscrew drive is described for the latter system.
A stylus based measuring instrument, called "Nanosurf 2", that incorporates the polymeric
slideway is presented in chapter 4. The performance of this system has been assessed and the
results are presented in the following chapter.
The linearity and accuracy of an electromagnetically driven, single crystal silicon, monolithic
spring make it a suitable for use as the translation mechanism in a Scanning Tunnelling
Microscope. Consequently, a three-axis spring has been constructed to generate the translations
required for imaging. An X-ray interferometer is built into the probe axis to facilitate absolute
calibration. This work is preceeded by an investigation into the generation of complex shapes in
this brittle material.
Finally, the current status of this work is reported with the presentation of initial experimental
|Item Type:||Thesis or Dissertation (PhD)|
|Subjects:||T Technology > TJ Mechanical engineering and machinery|
|Library of Congress Subject Headings (LCSH):||Measurement -- Methodology, Mechanical engineering -- Equipment and supplies|
|Institution:||University of Warwick|
|Theses Department:||School of Engineering|
|Supervisor(s)/Advisor:||Bowen, D. Keith (David Keith), 1940- ; Chetwynd, D. G. (Derek G.), 1948-|
|Sponsors:||National Physical Laboratory (Great Britain)|
|Extent:||[viii], 226,  leaves|
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