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Chemical solution deposited silver tantalate niobate, Ag x (Ta0.5Nb0.5)O3−y , thin films on (111)Pt/Ti/SiO2/(100)Si substrates
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Telli, Mustafa Burak, Trolier-McKinstry, Susan, Woodward, David I. and Reaney, Ian M. (2007) Chemical solution deposited silver tantalate niobate, Ag x (Ta0.5Nb0.5)O3−y , thin films on (111)Pt/Ti/SiO2/(100)Si substrates. Journal of Sol-Gel Science and Technology, Vol.42 (No.3). pp. 407-414. doi:10.1007/s10971-006-0204-8 ISSN 0928-0707.
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Official URL: http://dx.doi.org/10.1007/s10971-006-0204-8
Abstract
Silver tantalate niobate films are candidates for temperature stable microwave dielectrics. In this work, a chemical solution deposition synthesis method was developed for Ag x (Ta0.5Nb0.5)O3−y films on Pt-coated Si substrates. Stable solutions with a range of silver stoichiometries were prepared using 2-methoxyethanol and pyridine as solvents, from AgNO3 and Nb and Ta ethoxide precursors. It was extremely difficult to prepare phase-pure perovskite films of Ag(Ta0.5Nb0.5)O3 on Pt-coated Si subtrates; instead a mixture of perovskite and natrotantite phases was identified. Such mixed phase films had dielectric constant ɛ r and dielectric loss tanδ values ranging from 200±20 to 270±25 and 0.006±0.002 to 0.002±0.001 at 100 kHz, respectively, depending on the firing temperature. For Ag2(Ta0.5Nb0.5)4O11, Ag0.8(Ta0.5Nb0.5)O2.9, Ag0.85(Ta0.5Nb0.5)O2.925 and Ag0.9(Ta0.5Nb0.5)O2.95 films, mainly the natrotantite phase was observed. The ɛ r values of these films were between 70±10 and 130±15 with tan δ values of 0.008±0.002 at 100 kHz.
Item Type: | Journal Article | ||||
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Subjects: | Q Science > QC Physics Q Science > QD Chemistry |
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Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||
Library of Congress Subject Headings (LCSH): | Dielectrics, Thin films, Perovskite, Electrons -- Diffraction | ||||
Journal or Publication Title: | Journal of Sol-Gel Science and Technology | ||||
Publisher: | Springer New York LLC | ||||
ISSN: | 0928-0707 | ||||
Official Date: | 2007 | ||||
Dates: |
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Volume: | Vol.42 | ||||
Number: | No.3 | ||||
Page Range: | pp. 407-414 | ||||
DOI: | 10.1007/s10971-006-0204-8 | ||||
Status: | Peer Reviewed | ||||
Funder: | Center for Dielectric Studies |
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