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Improved self-gain in deep submicrometer strained silicon-germanium pMOSFETs with HfSiOx/TiSiN gate stacks
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Alatise, Olayiwola M., Olsen, Sarah H., O'Neill, Anthony G. and Majhi, Prashant (2010) Improved self-gain in deep submicrometer strained silicon-germanium pMOSFETs with HfSiOx/TiSiN gate stacks. Microelectronic Engineering, Vol.87 (No.11). pp. 2196-2199. doi:10.1016/j.mee.2010.02.002 ISSN 0167-9317.
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Official URL: http://dx.doi.org/10.1016/j.mee.2010.02.002
Abstract
The self-gain of surface channel compressively strained SiGe pMOSFETs with HfSiOx/TiSiN gate stacks is investigated for a range of gate lengths down to 55 nm. There is 125% and 700% enhancement in the self-gain of SiGe pMOSFETs compared with the Si control at 100 nm and 55 nm lithographic gate lengths, respectively. This improvement in the self-gain of the SiGe devices is due to 80% hole mobility enhancement compared with the Si control and improved electrostatic integrity in the SiGe devices due to less boron diffusion into the channel. At 55 nm gate length, the SiGe pMOSFETs show 50% less drain induced barrier lowering compared with the Si control devices. Electrical measurements show that the SiGe devices have larger effective channel lengths. It is shown that the enhancement in the self-gain of the SiGe devices compared with the Si control increases as the gate length is reduced thereby making SiGe pMOSFETs with HfSiOx/TiSiN gate stacks an excellent candidate for analog/mixed-signal applications.
| Item Type: | Journal Article | ||||
|---|---|---|---|---|---|
| Subjects: | Q Science > QC Physics T Technology > TK Electrical engineering. Electronics Nuclear engineering |
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| Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
| Library of Congress Subject Headings (LCSH): | Metal oxide semiconductor field-effect transistors, Silicon alloys | ||||
| Journal or Publication Title: | Microelectronic Engineering | ||||
| Publisher: | Elsevier BV | ||||
| ISSN: | 0167-9317 | ||||
| Official Date: | 2010 | ||||
| Dates: |
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| Volume: | Vol.87 | ||||
| Number: | No.11 | ||||
| Number of Pages: | 4 | ||||
| Page Range: | pp. 2196-2199 | ||||
| DOI: | 10.1016/j.mee.2010.02.002 | ||||
| Status: | Peer Reviewed | ||||
| Publication Status: | Published | ||||
| Access rights to Published version: | Restricted or Subscription Access | ||||
| Date of first compliant deposit: | 17 December 2015 | ||||
| Date of first compliant Open Access: | 17 December 2015 |
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