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The influence of beam energy on apparent layer thickness using ultralow energy O2+ SIMS on surface Si1−xGex
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Dowsett, M. G., Morris, R. J. H., Hand, M., Grigg, A. T., Walker, David and Beanland, R. (2011) The influence of beam energy on apparent layer thickness using ultralow energy O2+ SIMS on surface Si1−xGex. Surface and Interface Analysis, Vol.43 (No.1-2). pp. 211-213. doi:10.1002/sia.3433 ISSN 0142-2421.
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Official URL: http://dx.doi.org/10.1002/sia.3433
Abstract
A technique that employs energy sequencing, i.e. depth profiling a sample for a range of beam energies and then extrapolating the profile shape to zero beam energy, has been proposed as a means for removing the effects of atomic mixing and surface transient behavior. Here we have tested this approach in an attempt to establish the accurate thickness of a superficial (∼30 nm) Si1−xGex (x ∼ 0.3) layer. The conditions used were near-normal incidence O2+ and the energy range 0.25–2.5 keV. Energy-dependent apparent layer thicknesses were extracted for numerous points (90, 85, 75, 50, 21 and 10%) across the decaying Ge signal between the SiGe and underlying Si. A monotonic increase in apparent layer thickness was found as the energy was reduced across the range 2.5–0.4 keV. However, for beam energies < 0.4 keV, the apparent layer thickness was found to decrease suggesting that an increase in the relative surface-to-bulk erosion rate had outweighed any decrease in the true width of the transient region. This effect may be inescapable or caused by a nanometre-scale Ge rich layer at the surface. The behavior found here shows that the ‘zero beam energy’ profile shape is not necessarily closest to the truth. Copyright © 2010 John Wiley & Sons, Ltd.
Item Type: | Journal Article | ||||
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Subjects: | Q Science > QC Physics Q Science > QD Chemistry |
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Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||
Library of Congress Subject Headings (LCSH): | Silicon, Germanium, Interfaces (Physical sciences) | ||||
Journal or Publication Title: | Surface and Interface Analysis | ||||
Publisher: | John Wiley & Sons Ltd. | ||||
ISSN: | 0142-2421 | ||||
Official Date: | January 2011 | ||||
Dates: |
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Volume: | Vol.43 | ||||
Number: | No.1-2 | ||||
Page Range: | pp. 211-213 | ||||
DOI: | 10.1002/sia.3433 | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Access rights to Published version: | Restricted or Subscription Access |
Data sourced from Thomson Reuters' Web of Knowledge
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