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Nanotubes and nanorods on CMOS substrates for gas sensing
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Udrea, Florin, Santra, Sumita, Guha, Prasanta K., Ali, Syed Z., Covington, James A., Milne, W. I., Gardner, J. W. and Maeng, Sunglyul (2009) Nanotubes and nanorods on CMOS substrates for gas sensing. In: 13th International Symposium on Olfaction and the Electronic Nose, Brescia, Italy, 15-17 Apr 2009. Published in: Proceedings of the 13th International Symposium on Olfaction and Electronic Nose, Vol.1137 pp. 19-26. ISBN 978-0-7354-0674-2. doi:10.1063/1.3156507 ISSN 0094-243X.
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Official URL: http://dx.doi.org/10.1063/1.3156507
Abstract
In this paper we discuss the combined use of integrated CMOS microhotplates employing nanomaterial sensing layers for intelligent, compact gas sensors with increased sensitivity, selectivity and fast response times. We first review the status of nanomaterial‐based gas sensors, their operating principles, discussing growth issues and their compatibility with CMOS substrates. We then describe Multiwall (MW) Carbon Nanotubes (CNTs) and ZnO Nanowires (NW) growth∕deposition onto CMOS microhotplates. The paper continues by discussing the response of these nanomaterial sensing layers to vapours and gasses. Finally we discuss the future prospects of nanomaterial‐based CMOS gas sensors, highlighting on one hand their future potential and on the other hand their present shortcomings and future challenges that need to be addressed before they can be released commercially.
| Item Type: | Conference Item (Paper) | ||||
|---|---|---|---|---|---|
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering | ||||
| Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
| Library of Congress Subject Headings (LCSH): | Nanotubes, Metal oxide semiconductors, Complementary, Gas detectors, Polymeric composites, Carbon | ||||
| Series Name: | AIP Conference Proceedings | ||||
| Journal or Publication Title: | Proceedings of the 13th International Symposium on Olfaction and Electronic Nose | ||||
| Publisher: | American Institute of Physics | ||||
| ISBN: | 978-0-7354-0674-2 | ||||
| ISSN: | 0094-243X | ||||
| Editor: | Pardo, M and Sberveglieri, G | ||||
| Official Date: | 2009 | ||||
| Dates: |
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| Volume: | Vol.1137 | ||||
| Number of Pages: | 4 | ||||
| Page Range: | pp. 19-26 | ||||
| DOI: | 10.1063/1.3156507 | ||||
| Status: | Peer Reviewed | ||||
| Publication Status: | Published | ||||
| Access rights to Published version: | Restricted or Subscription Access | ||||
| Conference Paper Type: | Paper | ||||
| Title of Event: | 13th International Symposium on Olfaction and the Electronic Nose | ||||
| Type of Event: | Other | ||||
| Location of Event: | Brescia, Italy | ||||
| Date(s) of Event: | 15-17 Apr 2009 |
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