Ali, Syed Z., Santra, Sumita, Haneef, I., Schwandt, C., Kumar, Rakesh, Milne, W. I., Udrea, Florin, Guha, Prasanta K., Covington, James A., Gardner, J. W. and Garofalo, V. (2009) Nanowire hydrogen gas sensor employing CMOS micro-hotplate. In: 8th IEEE Conference on Sensors, Christchurch, New Zealand, 25-28 Oct 2009. Published in: IEEE Sensors 2009 pp. 114-117. doi:10.1109/ICSENS.2009.5398224 ISSN 1930-0395.

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Abstract

In this paper we present a novel hydrogen gas sensor comprising a high temperature SOI-MOS micro-hotplate and employing zinc oxide nanowires as the sensing material. The micro-hotplates were fabricated at a commercial SOI foundry followed by a backside deep reactive ion etch (DRIE) at a commercial MEMS foundry. Particular care was taken in designing the heater shape using a systematic parametric approach to achieve excellent temperature uniformity (within 1-2%) as shown by both simulations and experimental infrared imaging results. Zinc oxide nanowires were grown on these devices and show promising responses to hydrogen with a response (Ra/Rh) of 50 at 100 ppm in argon. The devices possess a low D.C. power consumption of only 16 mW at 300°C and, being CMOS compatible, offer low unit cost in high volumes and full circuit integration. We believe that these devices have potential for application as a sub-$1 hydrogen sensor with sub-1mW (pulsed mode) power consumption.

Item Type:	Conference Item (Paper)
Subjects:	T Technology > TA Engineering (General). Civil engineering (General) T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions:	Faculty of Science, Engineering and Medicine > Engineering > Engineering
Library of Congress Subject Headings (LCSH):	Nanowires, Metal oxide semiconductors, Complementary, Gas detectors -- Design and construction, Silicon-on-insulator technology, Zinc oxide
Journal or Publication Title:	IEEE Sensors 2009
Publisher:	Institute of Electrical and Electronic Engineers
ISSN:	1930-0395
Book Title:	2009 IEEE Sensors
Official Date:	2009
Dates:	Date Event 2009 Published
Page Range:	pp. 114-117
DOI:	10.1109/ICSENS.2009.5398224
Status:	Peer Reviewed
Publication Status:	Published
Access rights to Published version:	Restricted or Subscription Access
Conference Paper Type:	Paper
Title of Event:	8th IEEE Conference on Sensors
Type of Event:	Conference
Location of Event:	Christchurch, New Zealand
Date(s) of Event:	25-28 Oct 2009

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