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High temperature robust SOI ethanol sensor
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Gardner, J. W., Ahmed, T., Moseley, P. T., Ali, Syed Z., Chowdhury, M. F. and Udrea, Florin (2011) High temperature robust SOI ethanol sensor. In: Eurosensors XXV, Athens, Greece, Sep 4-7, 2011. Published in: Procedia Engineering, Vol.25 pp. 1317-1320. doi:10.1016/j.proeng.2011.12.325 ISSN 1877-7058.
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Official URL: http://dx.doi.org/10.1016/j.proeng.2011.12.325
Abstract
In this paper we present a robust SOI-CMOS ethanol sensor based on a tungsten-doped lanthanum iron oxide sensing material. The device shows response to gas, has low power consumption, good uniformity, high temperature stability and can be manufactured at low cost and with integrated circuitry. The platform is a tungsten-based CMOS micro- hotplate that has been shown to be stable for over two thousand hours at a high temperature (600 °C) in a form of accelerated life test. The tungsten-doped lanthanum iron oxide was deposited on the micro-hotplate as a slurry with terpineol using a syringe, dried and annealed. Preliminary gas testing was done and the material shows response to ethanol vapour. These results are promising and we believe that this combination of a robust CMOS micro-hotplate and a good sensing material can form the basis for a commercial CMOS gas sensor.
| Item Type: | Conference Item (Paper) | ||||
|---|---|---|---|---|---|
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering | ||||
| Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
| Journal or Publication Title: | Procedia Engineering | ||||
| Publisher: | Elsevier BV | ||||
| ISSN: | 1877-7058 | ||||
| Official Date: | 2011 | ||||
| Dates: |
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| Volume: | Vol.25 | ||||
| Page Range: | pp. 1317-1320 | ||||
| DOI: | 10.1016/j.proeng.2011.12.325 | ||||
| Status: | Peer Reviewed | ||||
| Publication Status: | Published | ||||
| Access rights to Published version: | Open Access (Creative Commons) | ||||
| Conference Paper Type: | Paper | ||||
| Title of Event: | Eurosensors XXV | ||||
| Type of Event: | Conference | ||||
| Location of Event: | Athens, Greece | ||||
| Date(s) of Event: | Sep 4-7, 2011 |
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