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Zinc oxide nanowire based hydrogen sensor on SOI CMOS platform
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Guha, Prasanta K., Santra, Sumita, Covington, James A., Udrea, Florin and Gardner, J. W. (2011) Zinc oxide nanowire based hydrogen sensor on SOI CMOS platform. In: Eurosensors XXV, Athens, Greece, Sep 4-7, 2011. Published in: Procedia Engineering, Vol.25 pp. 1473-1476. doi:10.1016/j.proeng.2011.12.364 ISSN 1877-7058.
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Official URL: http://dx.doi.org/10.1016/j.proeng.2011.12.364
Abstract
Here we report on the successful low-temperature growth of zinc oxide nanowires (ZnONWs) on silicon-on- insulator (SOI) CMOS micro-hotplates and their response, at different operating temperatures, to hydrogen in air. The SOI micro-hotplates were fabricated in a commercial CMOS foundry followed by a deep reactive ion etch (DRIE) in a MEMS foundry to form ultra-low power membranes. The micro-hotplates comprise p + silicon micro-heaters and interdigitated metal electrodes (measuring the change in resistance of the gas sensitive nanomaterial). The ZnONWs were grown as a post-CMOS process onto the hotplates using a CMOS friendly hydrothermal method. The ZnONWs showed a good response to 500 to 5000 ppm of hydrogen in air. We believe that the integration of ZnONWs with a MEMS platform results in a low power, low cost, hydrogen sensor that would be suitable for handheld battery- operated gas sensors.
| Item Type: | Conference Item (Paper) | ||||
|---|---|---|---|---|---|
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering | ||||
| Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
| Journal or Publication Title: | Procedia Engineering | ||||
| Publisher: | Elsevier BV | ||||
| ISSN: | 1877-7058 | ||||
| Official Date: | 2011 | ||||
| Dates: |
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| Volume: | Vol.25 | ||||
| Page Range: | pp. 1473-1476 | ||||
| DOI: | 10.1016/j.proeng.2011.12.364 | ||||
| Status: | Peer Reviewed | ||||
| Publication Status: | Published | ||||
| Access rights to Published version: | Open Access (Creative Commons) | ||||
| Conference Paper Type: | Paper | ||||
| Title of Event: | Eurosensors XXV | ||||
| Type of Event: | Conference | ||||
| Location of Event: | Athens, Greece | ||||
| Date(s) of Event: | Sep 4-7, 2011 |
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