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Post-CMOS wafer level growth of carbon nanotubes for low-cost microsensors-a proof of concept
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Santra, Sumita, Ali, Syed Z., Guha, Prasanta K., Zhong, Guofang, Robertson, J., Covington, James A., Milne, W. I., Gardner, J. W. and Udrea, Florin (2010) Post-CMOS wafer level growth of carbon nanotubes for low-cost microsensors-a proof of concept. Nanotechnology, Vol.21 (No.48). Article: 485301. doi:10.1088/0957-4484/21/48/485301 ISSN 0957-4484.
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Official URL: http://dx.doi.org/10.1088/0957-4484/21/48/485301
Abstract
Here we demonstrate a novel technique to grow carbon nanotubes (CNTs) on addressable localized areas, at wafer level, on a fully processed CMOS substrate. The CNTs were grown using tungsten micro-heaters (local growth technique) at elevated temperature on wafer scale by connecting adjacent micro-heaters through metal tracks in the scribe lane. The electrical and optical characterization show that the CNTs are identical and reproducible. We believe this wafer level integration of CNTs with CMOS circuitry enables the low-cost mass production of CNT sensors, such as chemical sensors.
| Item Type: | Journal Article | ||||
|---|---|---|---|---|---|
| Subjects: | T Technology > TA Engineering (General). Civil engineering (General) T Technology > TK Electrical engineering. Electronics Nuclear engineering |
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| Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
| Library of Congress Subject Headings (LCSH): | Nanotubes, Carbon, Metal oxide semiconductors, Complementary, Detectors | ||||
| Journal or Publication Title: | Nanotechnology | ||||
| Publisher: | Institute of Physics Publishing Ltd. | ||||
| ISSN: | 0957-4484 | ||||
| Official Date: | 3 December 2010 | ||||
| Dates: |
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| Volume: | Vol.21 | ||||
| Number: | No.48 | ||||
| Number of Pages: | 7 | ||||
| Page Range: | Article: 485301 | ||||
| DOI: | 10.1088/0957-4484/21/48/485301 | ||||
| Status: | Peer Reviewed | ||||
| Publication Status: | Published | ||||
| Access rights to Published version: | Restricted or Subscription Access | ||||
| Funder: | Engineering and Physical Sciences Research Council (EPSRC), European Commission (EC) | ||||
| Grant number: | EP/F004931/1 (EPSRC), EP/F002971/1 (EPSRC) |
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