The Library
A methodology for accelerated testing by mechanical actuation of MEMS devices
Tools
Tools
Tools
McMahon, Michael F. and Jones, Jeffrey Alun (2012) A methodology for accelerated testing by mechanical actuation of MEMS devices. Microelectronics Reliability, Vol.52 (No.7). pp. 1382-1388. doi:10.1016/j.microrel.2012.02.007 ISSN 0026-2714.
Research output not available from this repository.
Request-a-Copy directly from author or use local Library Get it For Me service.
Official URL: http://dx.doi.org/10.1016/j.microrel.2012.02.007
Abstract
In order to fully understand the reliability issues around MEMS device a means of carrying out accelerated testing is required. This research investigated the use of mechanical means to actuate MEMS membranes so that lifetime estimates could be obtained. A Talysurf measurement system was adapted to allow a MEMS membrane to be cycled by moving it with a stylus. This cycling was continued until the membrane failed according to the definitions provided by the device manufacturer. This experiment was repeated with different forces and this allowed standard life testing techniques to be used to produce a prediction of lifetime under normal use conditions. The lifetime predicted was of the order of 30 million cycles and was in keeping with the expectations of the device manufacturer for this geometry and materials. This demonstrated that the acceleration technique is a valid way to accelerate the device type and so can provide a method for predicting lifetimes for other devices. Such a prediction will be useful in Understanding the reliability of MEMS devices in actual usage.
| Item Type: | Journal Article | ||||
|---|---|---|---|---|---|
| Divisions: | Faculty of Science, Engineering and Medicine > Engineering > WMG (Formerly the Warwick Manufacturing Group) | ||||
| Journal or Publication Title: | Microelectronics Reliability | ||||
| Publisher: | Elsevier Ltd | ||||
| ISSN: | 0026-2714 | ||||
| Official Date: | 2012 | ||||
| Dates: |
|
||||
| Volume: | Vol.52 | ||||
| Number: | No.7 | ||||
| Page Range: | pp. 1382-1388 | ||||
| DOI: | 10.1016/j.microrel.2012.02.007 | ||||
| Status: | Peer Reviewed | ||||
| Publication Status: | Published | ||||
| Access rights to Published version: | Restricted or Subscription Access |
Request changes or add full text files to a record
Repository staff actions (login required)
 |
View Item |
