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Tuning of a superconducting microwave resonator at 77 K using an integrated micromachined silicon vertical actuator

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Prest, M. J. (Martin J.), Wang, Y., Huang, F. and Lancaster, M. J.. (2010) Tuning of a superconducting microwave resonator at 77 K using an integrated micromachined silicon vertical actuator. Journal of Micromechanics and Microengineering, Vol.20 (No.9). ISSN 0960-1317

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Official URL: http://dx.doi.org/10.1088/0960-1317/20/9/095032

Abstract

A silicon micromachined actuator is used to tune a high temperature superconducting microwave resonator. The superconducting resonator is only 1.24 mm x 0.66 mm and demonstrates a Q of up to 1078 at 6.3 GHz and at 77 K. A tuning range of 12% is demonstrated with a maximum applied voltage of 40 V. The frequency of the resonator is controlled by the proximity of a silicon tuning probe. The room temperature resistivity of the silicon is measured to be 20 Omega cm; this value drops as the device is cooled, but remains the limiting factor in the quality factor of the device. This proof of principle experiment demonstrates the application of silicon micromachining for tuning of superconducting microwave circuits, which is achieved despite the difficulties presented by differing material properties and thermal constraints when cooling to 77 K.

Item Type:

Journal Article

Subjects:

T Technology > TK Electrical engineering. Electronics Nuclear engineering

Divisions:

Faculty of Science > Physics

Library of Congress Subject Headings (LCSH):

Actuators, Microwave devices, Resonators, Micromachining

Journal or Publication Title:

Journal of Micromechanics and Microengineering

Publisher:

IOP Publishing Ltd

ISSN:

0960-1317

Official Date:

September 2010

Dates:

Date	Event
September 2010	Published

Volume:

Vol.20

Number:

No.9

Number of Pages:

Identification Number:

10.1088/0960-1317/20/9/095032

Status:

Not Peer Reviewed

Publication Status:

Published

Access rights to Published version:

Restricted or Subscription Access

Funder:

Engineering and Physical Sciences Research Council (EPSRC), Sixth Framework Programme (European Commission) (FP6)

References:

[1] Prest M J, Wang Y, Huang F and Lancaster M J 2008 Silicon comb-drive actuators for low-temperature tuning of superconducting microwave circuits J. Micromech. Microeng. 18 125003-125009
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[4] Prophet E M, Musolf J, Zuck B F, Jimenez S, Kihlstrom K E, Willemsen B A 2005 Highly-Selective Electronically-Tunable Cryogenic Filters Using Monolithic, Discretely-Switchable MEMS Capacitor Arrays IEEE Transactions on Applied Superconductivity 15 956-959
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[8] Prest M J, Wang Y, Huang F and Lancaster M J 2008 Silicon MEMS tunable supeconducting microwave circuits Proc. 9th Int. Symp. on RF MEMS and RF Microsystems (MEMSWAVE 2008) (Heraklion, Greece, 1-3 July 2008)
[9] Sonnet Simulation Tools 2006 Sonnet Software Inc., (Syracuse, NY)
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URI:

http://wrap.warwick.ac.uk/id/eprint/5268

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