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Tuning of a superconducting microwave resonator at 77 K using an integrated micromachined silicon vertical actuator
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Prest, M. J. (Martin J.), Wang, Y., Huang, F. and Lancaster, M. J. (2010) Tuning of a superconducting microwave resonator at 77 K using an integrated micromachined silicon vertical actuator. Journal of Micromechanics and Microengineering, Vol.20 (No.9). doi:10.1088/0960-1317/20/9/095032 ISSN 0960-1317.
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Official URL: http://dx.doi.org/10.1088/0960-1317/20/9/095032
Abstract
A silicon micromachined actuator is used to tune a high temperature superconducting microwave resonator. The superconducting resonator is only 1.24 mm x 0.66 mm and demonstrates a Q of up to 1078 at 6.3 GHz and at 77 K. A tuning range of 12% is demonstrated with a maximum applied voltage of 40 V. The frequency of the resonator is controlled by the proximity of a silicon tuning probe. The room temperature resistivity of the silicon is measured to be 20 Omega cm; this value drops as the device is cooled, but remains the limiting factor in the quality factor of the device. This proof of principle experiment demonstrates the application of silicon micromachining for tuning of superconducting microwave circuits, which is achieved despite the difficulties presented by differing material properties and thermal constraints when cooling to 77 K.
| Item Type: | Journal Article | ||||
|---|---|---|---|---|---|
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering | ||||
| Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||
| Library of Congress Subject Headings (LCSH): | Actuators, Microwave devices, Resonators, Micromachining | ||||
| Journal or Publication Title: | Journal of Micromechanics and Microengineering | ||||
| Publisher: | IOP Publishing Ltd | ||||
| ISSN: | 0960-1317 | ||||
| Official Date: | September 2010 | ||||
| Dates: |
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| Volume: | Vol.20 | ||||
| Number: | No.9 | ||||
| Number of Pages: | 6 | ||||
| DOI: | 10.1088/0960-1317/20/9/095032 | ||||
| Status: | Not Peer Reviewed | ||||
| Publication Status: | Published | ||||
| Access rights to Published version: | Restricted or Subscription Access | ||||
| Funder: | Engineering and Physical Sciences Research Council (EPSRC), Sixth Framework Programme (European Commission) (FP6) |
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