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Measurements of dislocation locking by near-surface ion implanted nitrogen in Czochralski silicon
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Alpass, Charles, Murphy, John D., Jain, Amitabh and Wilshaw, Peter R. (2008) Measurements of dislocation locking by near-surface ion implanted nitrogen in Czochralski silicon. In: 214th ECS Meeting, Honolulu, HI, 12-17 Oct 2008. Published in: ESC Transactions, Vol.16 (No.6). pp. 249-259. ISBN 1938-6737. doi:10.1149/1.2980308
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Official URL: http://dx.doi.org/10.1149/1.2980308
Abstract
A modified dislocation unlocking technique is used to measure dislocation locking due to nitrogen implanted into Czochralski silicon. The results show that near-surface dislocations can be locked by implanted nitrogen. The magnitude of the locking measured suggests that nitrogen transport proceeds by a dissociative mechanism, where transport occurs by the splitting of immobile dimers into fast monomers, rather than movement of nitrogen dimers. In other experiments, nitrogen-doped float-zone silicon is investigated using the standard dislocation unlocking technique. The results give an activation energy for effective nitrogen diffusion in silicon of 3.24{plus minus}0.25eV at 500 to 750{degree sign}C. Using the assumption that the dislocation locking strength per nitrogen atom is the same as that of oxygen, a value of 200,000cm2s-1 can be inferred for the effective diffusivity pre-factor. If analysed using the dissociative model, an activation energy of 1.1 to 1.4eV is found for nitrogen monomer diffusion, with a diffusivity pre-factor of 30cm2s-1.
Item Type: | Conference Item (Paper) | ||||
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Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
Journal or Publication Title: | ESC Transactions | ||||
Publisher: | Electrochemical Society, Inc. | ||||
ISBN: | 1938-6737 | ||||
Book Title: | ECS Transactions | ||||
Official Date: | 2008 | ||||
Dates: |
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Volume: | Vol.16 | ||||
Number: | No.6 | ||||
Page Range: | pp. 249-259 | ||||
DOI: | 10.1149/1.2980308 | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Access rights to Published version: | Restricted or Subscription Access | ||||
Conference Paper Type: | Paper | ||||
Title of Event: | 214th ECS Meeting | ||||
Type of Event: | Conference | ||||
Location of Event: | Honolulu, HI | ||||
Date(s) of Event: | 12-17 Oct 2008 |
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