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The influence of nitrogen on dislocation locking in float-zone silicon

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Murphy, John D., Giannattasio, A., Alpass, Charles R., Senkader, Semih, Falster, Robert and Wilshaw, Peter R. (2005) The influence of nitrogen on dislocation locking in float-zone silicon. Solid State Phenomena, Vol.108-109 . pp. 139-144. doi:10.4028/www.scientific.net/SSP.108-109.139 ISSN 1662-9779.

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Official URL: http://dx.doi.org/10.4028/www.scientific.net/SSP.1...

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Abstract

Dislocation locking by nitrogen impurities has been investigated in float-zone silicon with nitrogen concentrations of 2.2 x 1015cm-3 and 3 x 1014cm-3. The stress required to unlock dislocations pinned by nitrogen impurities was measured as a function of annealing time (0 to 2500 hours) and temperature (550 to 830ºC). For all conditions investigated the locking effect was found to increase linearly with annealing time before saturating. It is assumed that the rate of increase of unlocking stress with annealing time is a measure of transport of nitrogen to the dislocation core. This rate of increase was found to depend linearly on nitrogen concentration, which is consistent with transport by a dimeric species, whose activation energy for diffusion is approximately 1.4eV. The saturation unlocking stress has been found to be dependent on the nitrogen concentration. Additionally, the temperature dependence of the stress required to move dislocations immobilised by nitrogen impurities has been studied. By assuming a value for the binding energy of the nitrogen to the dislocation, the density of the locking species at the dislocation core has been calculated.

Item Type: Journal Article
Divisions: Faculty of Science, Engineering and Medicine > Engineering > Engineering
Journal or Publication Title: Solid State Phenomena
Publisher: Scitec Publications Ltd.
ISSN: 1662-9779
Official Date: 2005
Dates:
DateEvent
2005Published
Volume: Vol.108-109
Page Range: pp. 139-144
DOI: 10.4028/www.scientific.net/SSP.108-109.139
Status: Peer Reviewed
Publication Status: Published
Access rights to Published version: Restricted or Subscription Access

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