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Nitrogen transport in float-zone and Czochralski silicon investigated by dislocation locking experiments
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Murphy, John D., Giannattasio, A., Senkader, S., Falster, R. J. and Wilshaw, P. R. (2005) Nitrogen transport in float-zone and Czochralski silicon investigated by dislocation locking experiments. Physica Status Solidi. A: Applications and Materials Science, Vol.202 (No.5). pp. 926-930. doi:10.1002/pssa.200460532 ISSN 1862-6300.
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Official URL: http://dx.doi.org/10.1002/pssa.200460532
Abstract
Dislocation locking experiments have been used to investigate nitrogen-doped float-zone silicon (NFZ-Si). Experiments on NFZ-Si with a nitrogen concentration of 2.2 × 1015 cm–3 were carried out at different annealing temperatures (550–830 °C) for different annealing times (0–1500 hours) and experiments on NFZ-Si with a nitrogen concentration of 3 × 1014 cm–3 were carried out at 600 °C for 0–1200 hours. After an initial rise, the unlocking stress was found to saturate for all combinations of conditions investigated. The rate of the initial rise was found to be consistent with diffusion by a dimeric nitrogen species. The saturation value of the unlocking stress was found to be dependent on the nitrogen concentration. Experiments were also carried out on nitrogen-doped Czochralski silicon (NCz-Si) with an oxygen concentration of 5.74 × 1017 cm–3 and a nitrogen concentration of 2.10 × 1015 cm–3 at 600 °C from 0–5 hours. The dislocation locking due to oxygen appeared to be unaffected by the presence of nitrogen for the conditions investigated. (© 2005 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)
Item Type: | Journal Article | ||||
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Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
Journal or Publication Title: | Physica Status Solidi. A: Applications and Materials Science | ||||
Publisher: | Wiley-Blackwell Publishing Ltd. | ||||
ISSN: | 1862-6300 | ||||
Official Date: | 2005 | ||||
Dates: |
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Volume: | Vol.202 | ||||
Number: | No.5 | ||||
Page Range: | pp. 926-930 | ||||
DOI: | 10.1002/pssa.200460532 | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Access rights to Published version: | Restricted or Subscription Access |
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