Morris, R. J. H. (Richard J. H.), Dowsett, M. G., Beanland, R., Parbrook, P. J. and McConville, C. F. (Chris F.) (2010) Accurate ultra-low-energy secondary ion mass spectrometry analysis of wide bandgap GaN/InxGa1-xN structures using optical conductivity enhancement. Rapid Communications in Mass Spectrometry, Vol.24 (No.14). pp. 2122-2126. doi:10.1002/rcm.4623 ISSN 0951-4198.

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Abstract

Ultra-low-energy secondary ion mass spectrometry has been used to undertake a structural analysis of GaN-InxGa1-xN (x similar to 0.25) quantum wells used in optoelectronic devices. The high resistivity of intrinsic GaN-InxGa1-xN restricts the necessary electrical path between the analyzed area and the instrument ground potential resulting in surface charge accumulation. Consequently, unstable and unrepresentative depth profiles tend to be produced. A technique known as optical conductivity enhancement (OCE) has been used during depth profiling to reduce the material resistivity. This creates an electrical path between the sample and holder, eliminating charge build up and resulting in accurate depth profiles.

Item Type:	Journal Article
Subjects:	Q Science > QD Chemistry Q Science > QC Physics
Divisions:	Faculty of Science, Engineering and Medicine > Science > Physics
Journal or Publication Title:	Rapid Communications in Mass Spectrometry
Publisher:	John Wiley & Sons Ltd.
ISSN:	0951-4198
Official Date:	July 2010
Dates:	Date Event July 2010 Published
Volume:	Vol.24
Number:	No.14
Number of Pages:	5
Page Range:	pp. 2122-2126
DOI:	10.1002/rcm.4623
Status:	Peer Reviewed
Publication Status:	Published
Access rights to Published version:	Restricted or Subscription Access

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