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SOI CMOS integrated zinc oxide nanowire for toluene detection
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Santra, Sumita, Guha, Prasanta K., Ray, S. K., Udrea, Florin and Gardner, J. W. (2013) SOI CMOS integrated zinc oxide nanowire for toluene detection. In: 2013 IEEE 5th International Nanoelectronics Conference, INEC 2013, Singapore, 2-4 Jan 2013. Published in: Nanoelectronics Conference (INEC), 2013 IEEE 5th International pp. 119-121. ISBN 9781467348409. doi:10.1109/INEC.2013.6465972
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Official URL: http://dx.doi.org/10.1109/INEC.2013.6465972
Abstract
The paper reports on the in-situ growth of zinc oxide nanowires (ZnONWs) on a complementary metal oxide semiconductor (CMOS) substrate, and their performance as a sensing element for ppm (parts per million) levels of toluene vapour in 3000 ppm humid air. Zinc oxide NWs were grown using a low temperature (only 90°C) hydrothermal method. The ZnONWs were first characterised both electrically and through scanning electron microscopy. Then the response of the on-chip ZnONWs to different concentrations of toluene (400-2600ppm) was observed in air at 300°C. Finally, their gas sensitivity was determined and found to lie between 0.1% and 0.3% per ppm.
Item Type: | Conference Item (Paper) | ||||
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Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
Journal or Publication Title: | Nanoelectronics Conference (INEC), 2013 IEEE 5th International | ||||
Publisher: | IEEE | ||||
ISBN: | 9781467348409 | ||||
Book Title: | 2013 IEEE 5th International Nanoelectronics Conference (INEC) | ||||
Official Date: | 2013 | ||||
Dates: |
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Page Range: | pp. 119-121 | ||||
DOI: | 10.1109/INEC.2013.6465972 | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Access rights to Published version: | Restricted or Subscription Access | ||||
Conference Paper Type: | Paper | ||||
Title of Event: | 2013 IEEE 5th International Nanoelectronics Conference, INEC 2013 | ||||
Type of Event: | Conference | ||||
Location of Event: | Singapore | ||||
Date(s) of Event: | 2-4 Jan 2013 |
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