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Innovative 3C-SiC on SiC via direct wafer bonding
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Jennings, M. R., Pérez-Tomás, Amador, Severino, Andrea, Ward, Peter J., Bashir, Arif, Fisher, Craig A., Thomas, Stephen M., Gammon, P. M., Donnellan, Benedict T., Rong, Hua, Hamilton, Dean P. and Mawby, P. A. (Philip A.) (2013) Innovative 3C-SiC on SiC via direct wafer bonding. In: 9th European Conference on Silicon Carbide and Related Materials, ECSCRM 2012, St. Petersburg, Russian Federation, 2 - 6 Sept 2012. Published in: Materials Science Forum, 740-742 pp. 271-274. ISBN 978-303785624-6. doi:10.4028/www.scientific.net/MSF.740-742.271 ISSN 1662-9752.
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Official URL: http://dx.doi.org/10.4028/www.scientific.net/MSF.7...
Abstract
In this paper, we report on a novel direct wafer bonding technique; Si (111) wafers to polycrystalline silicon carbide carrier wafers. The purpose of this work is to provide a platform for 3C-SiC epitaxial growth above the wafer bonded Si (111) wafers. We have demonstrated reduced wafer bow, confirmed by optical microscopy together with a digital camera. 3C-SiC epitaxial layers have been grown by conventional chemical vapor deposition techniques above Si/SiC structures. All of these 3C-SiC epitaxial layers are highly crystalline in nature. In the future, the realization of thick, bow-free 3C-SiC layers suitable for power device fabrication is achievable.
Item Type: | Conference Item (Paper) | ||||
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Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
Journal or Publication Title: | Materials Science Forum | ||||
Publisher: | Trans Tech Publications Ltd. | ||||
ISBN: | 978-303785624-6 | ||||
ISSN: | 1662-9752 | ||||
Official Date: | January 2013 | ||||
Dates: |
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Volume: | 740-742 | ||||
Page Range: | pp. 271-274 | ||||
DOI: | 10.4028/www.scientific.net/MSF.740-742.271 | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Access rights to Published version: | Restricted or Subscription Access | ||||
Conference Paper Type: | Paper | ||||
Title of Event: | 9th European Conference on Silicon Carbide and Related Materials, ECSCRM 2012 | ||||
Type of Event: | Workshop | ||||
Location of Event: | St. Petersburg, Russian Federation | ||||
Date(s) of Event: | 2 - 6 Sept 2012 |
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