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Vibration analysis of stylus instrument for random surface measurement

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Tian, Yanling, Liu, X., Chetwynd, D. G. (Derek G.), 1948-, Shirinzadeh, B. and Zhang, D.. (2010) Vibration analysis of stylus instrument for random surface measurement. Precision Engineering - Journal of the International Societies for Precision Engineering and Nanotechnology, Vol.34 (No.3). pp. 586-591. ISSN 0141-6359

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Official URL: http://dx.doi.org/10.1016/j.precisioneng.2010.03.0...

Abstract

This paper presents dynamic modeling and vibration analysis methodologies for investigating surface profile fidelity in stylus instruments, using a novel dynamic model that takes account of Hertzian contact stiffness between the stylus tip and surface. It briefly describes generation methods for modelling random surfaces and finite tips, which provide input for this nonlinear dynamic system. The influence of the damping ratio on the dynamic performance of the stylus instrument is examined and tends to confirm other recent work. The best combinations of signal fidelity and measurement speed occur with damping ratios considerably higher than conventionally used, mainly because the damping can suppress or delay tip flight. Residual vibrations associated with start-up transients are shown to have potentially serious effects on the signal fidelity. Hence, the responses of the stylus system to three typical velocity control signals are investigated. The normally used step control signal can generate relatively large residual vibration, while slope control and, even better, cycloidal control signal can suppress the residual vibration and guarantee the signal fidelity.

Item Type:	Journal Article
Subjects:	T Technology > T Technology (General)
Divisions:	Faculty of Science > Engineering
Library of Congress Subject Headings (LCSH):	Surfaces (Technology) -- Mathematical models, Measuring instruments -- Vibration, Surface roughness -- Measurement
Journal or Publication Title:	Precision Engineering - Journal of the International Societies for Precision Engineering and Nanotechnology
Publisher:	Elsevier Science Inc.
ISSN:	0141-6359
Date:	July 2010
Volume:	Vol.34
Number:	No.3
Number of Pages:	6
Page Range:	pp. 586-591
Identification Number:	10.1016/j.precisioneng.2010.03.001
Status:	Peer Reviewed
Publication Status:	Published
Access rights to Published version:	Restricted or Subscription Access
Funder:	Guo jia zi ran ke xue ji jin wei yuan hui (China) [National Natural Science Foundation of China] (NSFC), Natural Science Foundation of Tianjin (NSFT), Australian Research Council (ARC)
Grant number:	50705064 (NSFC), 08JCYBJC01400 (NSFT), DP0450944 (ARC), DP0666366 (ARC), LE0347024 (ARC), LE0775692 (ARC)
References:	[1] M.N.H. Damir, Error in measurement due to stylus kinematics, Wear, 26 (1973) 219–227. [2] J.I. McCool, Assessing the effect of stylus tip radius and flight on surface topography measurements, Trans. ASME, J. Tribol., 106(1984) 202–210. [3] J.F. Song, T.V. Vorburger, Stylus flight in surface profiling, Trans. ASME, J. Manuf. Sci. Eng., 118(1996) 188–198. [4] P. Pawlus, M. Smieszek, The influence of stylus flight on change of surface topography parameters, Precis. Eng., 29(2005) 272–280. [5] D.J. Whitehouse, Dynamic aspects of scanning surface instruments and microscopes, Nanotechnology, 1(1990) 93–102. [6] D.J. Whitehouse, Enhancement of instrument and machine capabilities, Nanotechnology, 7(1996) 47–51. [7] X. Liu, D.G. Chetwynd and S.T. Smith et al., Improvement of the fidelity of surface measurement by active damping control, Meas. Sci. Tech., 4(1993) 1330–1340. [8] Y. Tian, X. Liu, D. Zhang, D. Chetwynd, Dynamic modelling of the fidelity of random surface measurement by the stylus method, Wear, 266(2009) 555–559. [9] J.J. Wu, Simulation of non-Gaussian surfaces with FFT, Tribol. Int., 37(2004) 339–346. [10] V. Bakolas, Numerical generation of arbitrarily oriented non-Gaussian three-dimensional rough surface, Wear, 254(2003) 546–554. [11] S. Chilamakuri, B. Bhushan, Contact analysis of non-Gaussian random surfaces. Proc. Inst. Mech. Eng. Part J.-J. Eng. Tribol., 212(1998) 19-32.
URI:	http://wrap.warwick.ac.uk/id/eprint/5705