The Library
SOI sensing technologies for harsh environment
Tools
Tools
Tools
Udrea, Florin, Ali, Syed Z., Brezeanu, M., Dumitru, V., Buiu, O., Poenaru, I., Chowdhury, M. F., De Luca, A. and Gardner, J. W. (2012) SOI sensing technologies for harsh environment. In: 35th International Semiconductor Conference, CAS 2012 , Sinaia, Romania, 15-17 Oct 2012. Published in: Proceedings of the International Semiconductor Conference, CAS, Volume 1 pp. 3-10. doi:10.1109/SMICND.2012.6400708
Research output not available from this repository.
Request-a-Copy directly from author or use local Library Get it For Me service.
Official URL: http://dx.doi.org/10.1109/SMICND.2012.6400708
Abstract
This paper reviews and addresses certain aspects of Silicon-On-Insulator (SOI) technologies for a harsh environment. The paper first describes the need for specialized sensors in applications such as (i) domestic and other small-scale boilers, (ii) CO2 Capture and Sequestration, (iii) oil & gas storage and transportation, and (iv) automotive. We describe in brief the advantages and special features of SOI technology for sensing applications requiring temperatures in excess of the typical bulk silicon junction temperatures of 150oC. Finally we present the concepts, structures and prototypes of simple and smart micro-hotplate and Infra Red (IR) based emitters for NDIR (Non Dispersive IR) gas sensors in harsh environments.
| Item Type: | Conference Item (Paper) | ||||
|---|---|---|---|---|---|
| Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
| Journal or Publication Title: | Proceedings of the International Semiconductor Conference, CAS | ||||
| Publisher: | IEEE | ||||
| Book Title: | CAS 2012 (International Semiconductor Conference) | ||||
| Official Date: | 2012 | ||||
| Dates: |
|
||||
| Volume: | Volume 1 | ||||
| Page Range: | pp. 3-10 | ||||
| DOI: | 10.1109/SMICND.2012.6400708 | ||||
| Status: | Peer Reviewed | ||||
| Publication Status: | Published | ||||
| Access rights to Published version: | Restricted or Subscription Access | ||||
| Conference Paper Type: | Paper | ||||
| Title of Event: | 35th International Semiconductor Conference, CAS 2012 | ||||
| Type of Event: | Conference | ||||
| Location of Event: | Sinaia, Romania | ||||
| Date(s) of Event: | 15-17 Oct 2012 |
Request changes or add full text files to a record
Repository staff actions (login required)
 |
View Item |
