Santra, Sumita, Guha, Prasanta K., Ali, Syed Z., Hiralal, P., Unalan, H. E., Covington, James A., Amaratunga, G. A. J., Milne, W. I., Gardner, J. W. and Udrea, Florin (2010) ZnO nanowires grown on SOI CMOS substrate for ethanol sensing. Sensors and Actuators B-Chemical, Vol.146 (No.2 Sp. Iss. SI). pp. 559-565. doi:10.1016/j.snb.2010.01.009 ISSN 0925-4005.

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Abstract

This paper reports on the integration of zinc oxide nanowires (ZnO NWs) with a silicon on insulator (SOI) CMOS (complementary metal oxide semiconductor) micro-hotplate for use as an alcohol sensor. The micro-hotplates consist of a silicon resistive micro-heater embedded within a membrane (composed of silicon oxide and silicon nitride, supported on a silicon substrate) and gold bump bonded aluminum electrodes that are used to make an ohmic contact with the sensing material. ZnO NWs were grown by a simple, low-cost hydrothermal method and characterised using SEM, XRD and photoluminiscence methods. The chemical sensitivity of the on-chip NWs to ethanol vapour (at different humidity levels) was characterised at two different temperatures namely, 300 degrees C and 400 degrees C (power consumption was 24 mW and 33 mW, respectively), and the sensitivity was found to be 0.1%/ppm (response 4.7 at 4363 ppm). These results show that ZnO NWs are a promising material for use as a CMOS ethanol gas sensor that offers low cost, low power consumption and integrated circuitry.

Item Type:	Journal Article
Subjects:	Q Science > QD Chemistry
Divisions:	Faculty of Science, Engineering and Medicine > Engineering > Engineering
Journal or Publication Title:	Sensors and Actuators B-Chemical
Publisher:	Elsevier Science
ISSN:	0925-4005
Official Date:	29 April 2010
Dates:	Date Event 29 April 2010 Published
Volume:	Vol.146
Number:	No.2 Sp. Iss. SI
Number of Pages:	7
Page Range:	pp. 559-565
DOI:	10.1016/j.snb.2010.01.009
Status:	Peer Reviewed
Publication Status:	Published
Access rights to Published version:	Restricted or Subscription Access
Funder:	Engineering and Physical Sciences Research Council (EPSRC), Ministry of Information and Communications, Republic of Korea
Grant number:	EP/F004931/1, EP/F002971/1, RG46736
Version or Related Resource:	This paper was also presented at the 13th International Symposium on Olfaction and Electronic Nose (ISOEN 2009), Brescia, Italy, April 15 - 17, 2009.

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