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Introduction of terraces into a reverse linearly graded SiGe buffer on Si(001) substrate and their effect on the buffer's structural properties
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Shah, V. A., Myronov, Maksym, Dobbie, A. (Andrew) and Leadley, D. R. (David R.) (2013) Introduction of terraces into a reverse linearly graded SiGe buffer on Si(001) substrate and their effect on the buffer's structural properties. ECS Journal of Solid State Science and Technology, Volume 2 (Number 3). Q40-Q44. doi:10.1149/2.018303jss ISSN 2162-8769.
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Official URL: http://dx.doi.org/10.1149/2.018303jss
Abstract
The effect of placing constant composition layers within a reverse graded Si1−xGex virtual substrate is investigated and the dislocation dynamics are tracked throughout the heterostructure. Heterostructures are grown by reduced pressure chemical vapor deposition and are truncated at different points in the buffer to separate the effect of strain and thermal budget from the upper layers upon dislocation motion. It is found that the very first terrace of x = 0.95 relives most of the strain within the buffer, remaining relatively smooth (1.2 nm) and annihilating the bulk of dislocations to give a low dislocation density of 2.8 × 106 cm−2. This discovery allows the entire buffer and its layers to be used as a complete integration platform.
Item Type: | Journal Article | ||||
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Subjects: | Q Science > QD Chemistry T Technology > TA Engineering (General). Civil engineering (General) |
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Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||
Library of Congress Subject Headings (LCSH): | Silicon alloys, Germanium alloys, Dislocations in metals, Chemical vapor deposition | ||||
Journal or Publication Title: | ECS Journal of Solid State Science and Technology | ||||
Publisher: | Electrochemical Society, Inc. | ||||
ISSN: | 2162-8769 | ||||
Official Date: | 4 January 2013 | ||||
Dates: |
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Volume: | Volume 2 | ||||
Number: | Number 3 | ||||
Page Range: | Q40-Q44 | ||||
DOI: | 10.1149/2.018303jss | ||||
Status: | Peer Reviewed | ||||
Publication Status: | Published | ||||
Access rights to Published version: | Restricted or Subscription Access | ||||
Funder: | Engineering and Physical Sciences Research Council (EPSRC), Seventh Framework Programme (European Commission) (FP7) | ||||
Grant number: | EP/F031408/1, EP/J001074/1 (EPSRC); 216171 (FP7) |
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