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Novel fabrication technique for Ge membranes
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Shah, V. A., Myronov, Maksym, Bawden, L., Prest, M. J. (Martin J.), Richardson-Bullock, J. S., Gammon, P. M., Rhead, S., Parker, Evan H. C., Whall, Terry E. and Leadley, D. R. (David R.) (2013) Novel fabrication technique for Ge membranes. In: ULIS 2013: The 14th International Conference on Ultimate Integration on Silicon, Coventry, UK, 19-21 March 2013. Published in: 14th International Conference on Ultimate Integration on Silicon pp. 181-184. ISBN 9781467348003. doi:10.1109/ULIS.2013.6523519
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Official URL: http://dx.doi.org/10.1109/ULIS.2013.6523514
Abstract
Suspended crystalline Ge semiconductor structures are created on a Si(001) substrate by a combination of epitaxial growth and simple patterning from the front surface using anisotropic underetching. Geometric definition of the surface Ge layer gives access to a range of crystalline planes that have different etch resistance. The structures are aligned to avoid etch-resistive planes in making the suspended regions and to take advantage of these planes to retain the underlying Si to support the structures. The technique is demonstrated by forming suspended microwires, spiderwebs and van der Pauw cross structures. We finally report on the low-temperature electrical isolation of the undoped Ge layers. This novel isolation method increases the Ge resistivity to 280 Ω cm at 10 K, over two orders of magnitude above that of a bulk Ge on Si(001) layer, by removing material containing the underlying misfit dislocation network that otherwise provides the main source of electrical conduction.
| Item Type: | Conference Item (Paper) | ||||
|---|---|---|---|---|---|
| Divisions: | Faculty of Science > Physics | ||||
| Journal or Publication Title: | 14th International Conference on Ultimate Integration on Silicon | ||||
| Publisher: | IEEE | ||||
| ISBN: | 9781467348003 | ||||
| Book Title: | 2013 14th International Conference on Ultimate Integration on Silicon (ULIS) | ||||
| Official Date: | 2013 | ||||
| Dates: |
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| Page Range: | pp. 181-184 | ||||
| DOI: | 10.1109/ULIS.2013.6523519 | ||||
| Status: | Peer Reviewed | ||||
| Publication Status: | Published | ||||
| Access rights to Published version: | Restricted or Subscription Access | ||||
| Conference Paper Type: | Paper | ||||
| Title of Event: | ULIS 2013: The 14th International Conference on Ultimate Integration on Silicon | ||||
| Type of Event: | Conference | ||||
| Location of Event: | Coventry, UK | ||||
| Date(s) of Event: | 19-21 March 2013 |
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