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Ptychography applied to optical metrology
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Claus, Daniel, Robinson, David J., Chetwynd, D. G., Yang, Shuo, Pike, W. Thomas and Rodenburg, John M. (2012) Ptychography applied to optical metrology. In: 5th International Conference on Speckle Metrology, Speckle 2012, Vigo, Spain, 10-12 Sept 2012. Published in: Proceedings of SPIE - The International Society for Optical Engineering, Volume 8413 Article number 84130O. doi:10.1117/12.977959 ISSN 0277-786X.
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Official URL: http://dx.doi.org/10.1117/12.977959
Abstract
This paper introduces ptychography, a novel and very exciting phase retrieval technique, to the field of optical metrology. Its working principle is explained and a useful application in combination with the dual wavelength method for topography measurement is presented. Advantages of the dual wavelength method compared to other optical topography measurement techniques, the experimental procedure and the analysis of the data are discussed
Item Type: | Conference Item (Paper) | ||||
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Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering | ||||
Journal or Publication Title: | Proceedings of SPIE - The International Society for Optical Engineering | ||||
Publisher: | S P I E - International Society for Optical Engineering | ||||
ISSN: | 0277-786X | ||||
Book Title: | Speckle 2012: V International Conference on Speckle Metrology | ||||
Official Date: | 11 September 2012 | ||||
Dates: |
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Volume: | Volume 8413 | ||||
Page Range: | Article number 84130O | ||||
DOI: | 10.1117/12.977959 | ||||
Status: | Not Peer Reviewed | ||||
Publication Status: | Published | ||||
Access rights to Published version: | Restricted or Subscription Access | ||||
Conference Paper Type: | Paper | ||||
Title of Event: | 5th International Conference on Speckle Metrology, Speckle 2012 | ||||
Type of Event: | Conference | ||||
Location of Event: | Vigo, Spain | ||||
Date(s) of Event: | 10-12 Sept 2012 |
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