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Tensile strain mapping in flat germanium membranes
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Rhead, S., Halpin, John E., Shah, V. A., Myronov, Maksym, Patchett, D. H., Allred, Phil, Kachkanov, V., Dolbnya, I. P., Reparaz, J. S., Wilson, Neil R., Sotomayor Torres, C. M. and Leadley, D. R. (David R.) (2014) Tensile strain mapping in flat germanium membranes. Applied Physics Letters, Volume 104 (Number 17). Article number 172107. doi:10.1063/1.4874836
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Official URL: http://dx.doi.org/10.1063/1.4874836
Abstract
Scanning X-ray micro-diffraction has been used as a non-destructive probe of the local crystalline quality of a thin suspended germanium (Ge) membrane. A series of reciprocal space maps were obtained with ∼4 μm spatial resolution, from which detailed information on the strain distribution, thickness, and crystalline tilt of the membrane was obtained. We are able to detect a systematic strain variation across the membranes, but show that this is negligible in the context of using the membranes as platforms for further growth. In addition, we show evidence that the interface and surface quality is improved by suspending the Ge.
| Item Type: | Journal Article | ||||||||
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| Subjects: | Q Science > QC Physics | ||||||||
| Divisions: | Faculty of Science, Engineering and Medicine > Science > Physics | ||||||||
| Library of Congress Subject Headings (LCSH): | Germanium -- Analysis | ||||||||
| Journal or Publication Title: | Applied Physics Letters | ||||||||
| Publisher: | American Institute of Physics | ||||||||
| ISSN: | 0003-6951 | ||||||||
| Official Date: | 2 May 2014 | ||||||||
| Dates: |
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| Volume: | Volume 104 | ||||||||
| Number: | Number 17 | ||||||||
| Article Number: | Article number 172107 | ||||||||
| DOI: | 10.1063/1.4874836 | ||||||||
| Status: | Peer Reviewed | ||||||||
| Publication Status: | Published | ||||||||
| Access rights to Published version: | Open Access | ||||||||
| Funder: | Engineering and Physical Sciences Research Council (EPSRC), Seventh Framework Programme (European Commission) (FP7), Advantage West Midlands (AWM), European Regional Development Fund (ERDF), Birmingham Science City | ||||||||
| Grant number: | EP/F040784/1 (EPSRC), EP/J001074/1 (EPSRC), EP/L007010/1 (EPSRC), 257375 (FP7), MAT2012–31392 (FP7), 309150 (FP7) |
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