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Tensile strain mapping in flat germanium membranes

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Rhead, S., Halpin, John E., Shah, V. A., Myronov, Maksym, Patchett, D. H., Allred, Phil, Kachkanov, V., Dolbnya, I. P., Reparaz, J. S., Wilson, Neil R., Sotomayor Torres, C. M. and Leadley, D. R. (David R.) (2014) Tensile strain mapping in flat germanium membranes. Applied Physics Letters, Volume 104 (Number 17). Article number 172107. doi:10.1063/1.4874836 ISSN 0003-6951.

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Official URL: http://dx.doi.org/10.1063/1.4874836

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Abstract

Scanning X-ray micro-diffraction has been used as a non-destructive probe of the local crystalline quality of a thin suspended germanium (Ge) membrane. A series of reciprocal space maps were obtained with ∼4 μm spatial resolution, from which detailed information on the strain distribution, thickness, and crystalline tilt of the membrane was obtained. We are able to detect a systematic strain variation across the membranes, but show that this is negligible in the context of using the membranes as platforms for further growth. In addition, we show evidence that the interface and surface quality is improved by suspending the Ge.

Item Type: Journal Article
Subjects: Q Science > QC Physics
Divisions: Faculty of Science, Engineering and Medicine > Science > Physics
Library of Congress Subject Headings (LCSH): Germanium -- Analysis
Journal or Publication Title: Applied Physics Letters
Publisher: American Institute of Physics
ISSN: 0003-6951
Official Date: 2 May 2014
Dates:
DateEvent
2 May 2014Published
18 April 2014Accepted
13 January 2014Submitted
Volume: Volume 104
Number: Number 17
Article Number: Article number 172107
DOI: 10.1063/1.4874836
Status: Peer Reviewed
Publication Status: Published
Access rights to Published version: Open Access (Creative Commons)
Date of first compliant deposit: 27 December 2015
Date of first compliant Open Access: 27 December 2015
Funder: Engineering and Physical Sciences Research Council (EPSRC), Seventh Framework Programme (European Commission) (FP7), Advantage West Midlands (AWM), European Regional Development Fund (ERDF), Birmingham Science City
Grant number: EP/F040784/1 (EPSRC), EP/J001074/1 (EPSRC), EP/L007010/1 (EPSRC), 257375 (FP7), MAT2012–31392 (FP7), 309150 (FP7)

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