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High quality single crystal Ge nano-membranes for opto-electronic integrated circuitry
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(2014) High quality single crystal Ge nano-membranes for opto-electronic integrated circuitry. Journal of Applied Physics, Volume 115 (Number 14). Article number 144307. doi:10.1063/1.4870807 ISSN 0021-8979.
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Official URL: http://dx.doi.org/10.1063/1.4870807
Abstract
A thin, flat, and single crystal germanium membrane would be an ideal platform on which to mount sensors or integrate photonic and electronic devices, using standard silicon processing technology. We present a fabrication technique compatible with integrated-circuit wafer scale processing to produce membranes of thickness between 60 nm and 800 nm, with large areas of up to 3.5 mm2. We show how the optical properties change with thickness, including appearance of Fabry-Pérot type interference in thin membranes. The membranes have low Q-factors, which allow the platforms to counteract distortion during agitation and movement. Finally, we report on the physical characteristics showing sub-nm roughness and a homogenous strain profile throughout the freestanding layer, making the single crystal Ge membrane an excellent platform for further epitaxial growth or deposition of materials.
| Item Type: | Journal Article | ||||||||
|---|---|---|---|---|---|---|---|---|---|
| Subjects: | Q Science > QC Physics | ||||||||
| Divisions: | Faculty of Science, Engineering and Medicine > Engineering > Engineering Faculty of Science, Engineering and Medicine > Science > Physics |
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| Library of Congress Subject Headings (LCSH): | Germanium, Semiconductors -- Design and construction | ||||||||
| Journal or Publication Title: | Journal of Applied Physics | ||||||||
| Publisher: | American Institute of Physics | ||||||||
| ISSN: | 0021-8979 | ||||||||
| Official Date: | 10 April 2014 | ||||||||
| Dates: |
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| Volume: | Volume 115 | ||||||||
| Number: | Number 14 | ||||||||
| Article Number: | Article number 144307 | ||||||||
| DOI: | 10.1063/1.4870807 | ||||||||
| Status: | Peer Reviewed | ||||||||
| Publication Status: | Published | ||||||||
| Access rights to Published version: | Restricted or Subscription Access | ||||||||
| Date of first compliant deposit: | 27 December 2015 | ||||||||
| Date of first compliant Open Access: | 27 December 2015 | ||||||||
| Funder: | Engineering and Physical Sciences Research Council (EPSRC), Seventh Framework Programme (European Commission) (FP7), European Research Council (ERC), Advantage West Midlands (AWM), European Regional Development Fund (ERDF), Birmingham Science City | ||||||||
| Grant number: | EP/F040784/1 (EPSRC), EP/J001074/1 (EPSRC), EP/L007010/1 (EPSRC), 257375 (FP7), MAT2012–31392 (FP7), 309150 (FP7), 202735 (ERC) |
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